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沉积温度对AlCrTiN涂层组织结构与性能的影响∗
林静, 张硕, 马德政, 范其香, 王铁钢, 曹凤婷
天津职业技术师范大学天津市高速切削与精密加工重点实验室 天津 300222
摘要:
AlCrTiN 涂层具有优异的综合性能,然而沉积温度对其组织结构与性能的影响还需进一步研究。 采用电弧离子镀和脉冲直流磁控溅射复合沉积技术,改变沉积温度(300 ℃和 400 ℃ )制备两种不同的 AlCrTiN 涂层。 结果表明:两种 AlCrTiN 涂层主要相均为 fcc-(Al,Ti,Cr)N 相,沿(111)晶面择优生长。 沉积温度为 400 ℃ 时,涂层具有更高的硬度和弹性模量,更低的残余应力、摩擦因数和磨损率,表现出更好的力学性能和抗摩擦磨损性能。 两种涂层经过 700 ℃保温 1 h 后,由于涂层内原子扩散和缺陷愈合,硬度和结合力进一步提高。 切削性能测试表明:300 ℃ 和 400 ℃ 温度下制备的涂层铣刀寿命分别为无涂层铣刀的 3. 2 倍和 3. 5 倍。 无涂层铣刀的失效形式以磨粒磨损为主,涂层铣刀的失效形式为磨粒磨损、黏着磨损和氧化磨损。 研究成果对高性能 AlCrTiN 四元涂层的制备、理论研究与工程化应用具有指导意义。
关键词:  AlCrTiN 涂层  组织结构  力学性能  摩擦磨损性能  高温热稳定性  切削性能
DOI:10.11933/j.issn.1007-9289.20210709001
分类号:TG174;TH161
基金项目:国家自然科学基金 (51501130);天津市科技特派员(20YDTPJC00900);天津市科技军民融合重大专项(18ZXJMTG00050)资助项目
Effects of Deposition Temperature on the Structure and Property of AlCrTiN Coatings
LIN Jing, ZHANG Shuo, MA Dezheng, FAN Qixiang, WANG Tiegang, CAO Fengting
Tianjin Key Laboratory of High Speed Cutting and Precision Machining,Tianjin University of Technology and Education, Tianjin 300222 , China
Abstract:
AlCrTiN coating possesses good comprehensive properties, while the effect of deposition temperature on the microstructure and properties needs to be further investigated. Two different AlCrTiN coatings are prepared by arc ion plating and direct current pulsed magnetron sputtering at 300 ℃ and 400 ℃ . Results show that the main phase of the two AlCrTiN coatings is fcc-(Al,Ti,Cr)N phase, which grows preferentially along the (111) crystal plane. The AlTiCrN coating deposited at 400 ℃ possesses higher hardness, elastic modulus, and lower residual stress, friction factor as well as wear rate indicating it has better mechanical properties and wear resistance. After heat treatment at 700 ℃ for 1 h, the hardness and adhesive strength of the two coatings are enhanced, due to atomic diffusion and defect healing. Cutting tests show that the cutting life of the AlCrTiN coated milling cutter is much higher than that of the uncoated milling cutter. The cutting lives of the AlCrTiN coated cutters prepared at 300 ℃ and 400 ℃ are 3. 2 and 3. 5 times larger than that of the uncoated cutter. The uncoated cutter loses efficacy mainly due to abrasive wear, while the coated cutters fail caused by abrasive, adhesive and oxidation wear. The research results have certain guiding significance for the preparation, theoretical research and application of AlCrTiN quaternary coatings.
Key words:  AlCrTiN coating  microstructure  mechanical property  tribological property  high temperature thermal stability  cutting performance