| 摘要: |
| 采用多弧离子镀(MAIP)方法在 Inconel 718 高温合金基体上沉积了氧化锆(ZrOx )薄膜,并对该薄膜进行了 800 ℃退火处理;研究了 O2 / Ar 两种气体流量比 RO2/ Ar(0. 25、0. 43、0. 67、1. 00、1. 50)及退火处理对沉积态薄膜的微观结构、力学性能及摩擦学性能的影响。 结果表明:随着 RO2/ Ar 从 0. 25 升高到 1. 50,沉积态薄膜的主要物相组成由不稳定的锆的氧化物(h-ZrO0. 35 、h-ZrO2 、h-Zr3O)逐渐转变为稳定的 m-ZrO2 ,薄膜截面结构由起初疏松的柱状晶逐渐转变为排列致密的柱状晶,薄膜硬度逐渐升高,O2 / Ar 比为 1. 50 时最大为 16. 7 GPa。 低 RO2/ Ar 下沉积的薄膜摩擦学性能很差,很快磨穿失效。 当 RO2/ Ar 超过 0. 67 时,薄膜的摩擦寿命显著提高,RO2/ Ar 为 1. 50 时薄膜磨损率最低为 1. 45×10-6 mm3 / (N·m)。 沉积态薄膜经过退火处理后主要物相转变为 m-ZrO2 ,薄膜表面变得更加光滑致密,薄膜硬度、弹性模量以及摩擦学性能均较退火前明显改善。 |
| 关键词: 多弧离子镀 氧化锆薄膜 退火处理 力学性能 摩擦学性能 |
| DOI：10.11933/j.issn.1007-9289.20200715001 |
| 分类号:TG174.444 |
| 文章编号:1007-9289(2020)05-0065-10 |
| 文献标识码:A |
| 基金项目:国家自然科学基金(51975561) |
|
| Effects of O2 / Ar Flow Ratios and Annealing Treatment on Microstructures and Tribological Properties of Zirconia Films |
|
Xu Wenju1,2, Ju Pengfei3, Li Hongxuan1, Ji Li1, Liu Xiaohong1, Chen Jianmin1
|
|
1.Key Laboratory of Science and Technology on Wear and Protection of Materials, Lanzhou Institute of Chemical Physics, Chi- nese Academy of Sciences, Lanzhou, 730000 , China;2.Center of Materials Science and Optoelectronics Engineering, Univer- sity of Chinese Academy of Sciences, Beijing, 100049 , China;3.Shanghai Aerospace Equipments Manufacturer Co, Ltd, Shanghai, 200245 , China
|
| Abstract: |
| Zirconia films are deposited on Inconel 718 alloys by multi-arc ion plating (MAIP) equipment at different O2 / Ar flow ratios. The effects of O2 / Ar flow ratios (0. 25, 0. 43, 0. 67, 1. 00,1. 50) and annealing treatment on the microstructure, mechanical properties and tribological properties of films are systematically studied. The results show that with the increase of O2 / Ar ratio from 0. 25 to 1. 50, the main phases of the deposited films change from unstable zirconium oxide(h-ZrO0. 35 、h-ZrO2 、 h-Zr3O)to stable m-ZrO2 gradually, and the cross section structures of films transform from loose columnar to compact columnar resulting obvious improvement of the hardness, and the maximum hardness is 16. 7 GPa when the O2 / Ar flow ratio is 1. 50. The films deposited at low O2 / Ar flow ratios invalid easily, but when the O2 / Ar ratio exceeds 0. 67, the films present outstanding friction resistance. The wear rate is only about 1. 45×10-6 mm3 / (N·m) when the O2 / Ar flow ratio is 1. 50. Furthermore, the main phases of all films transform into m-ZrO2 and the morphology become denser and smoother after annealing treatment, con-tributing to improvement of hardness, elastic modulus and tribological properties of the films. |
| Key words: multi-arc ion plating zirconia films annealing mechanical properties tribological properties |
