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负偏压和本底真空度对Al膜表面形貌和耐蚀性能的影响
胡方勤1, 曹振亚2, 张青科1, 杨丽景1, 宋振纶1
1.中国科学院 宁波材料技术与工程研究所 中国科学院海洋新材料与应用技术重点实验室 浙江省海洋材料与防护技 术重点实验室, 宁波 315201;2.中国科学技术大学 纳米科学技术学院, 合肥 230026
摘要:
采用电弧离子镀技术在烧结钕铁硼表面沉积 Al 薄膜。 利用表面轮廓仪、扫描电镜、激光共聚焦、电化学工作站和盐雾试验箱分析了负偏压和本底真空度对镀层形貌、性能和沉积速率的影响。 结果表明,镀层表面的液滴数量和粒径随负偏压和本底真空度的增加而减小;沉积速率与负偏压成反比,而与本底真空度成正比。 在负偏压为-100 V 时沉积速率最大,达到 4. 85 μm/ h。 随着负偏压和本底真空度的增加,腐蚀电流密度减小,耐盐雾时长增加,负偏压为 -200 V 时 Al / NdFeB 样品具有较好的耐蚀性。
关键词:  Al 薄膜  电弧离子镀  负偏压  本底真空度  耐蚀性
DOI:10.11933/j.issn.1007-9289.20200721001
分类号:TG178
文章编号:1007-9289(2020)04-0128-08
文献标识码:A
基金项目:宁波市“科技创新 2025”重大专项项目(2019B10100、2019B10094、2020Z045)
Effects of Negative Bias Voltage and Base Vacuum Degree on Surface Morphology and Corrosion Resistance of Al Coatings
Hu Fangqin1, Cao Zhenya2, Zhang Qingke1, Yang Lijing1, Song Zhenlun1
1.Zhejiang Key Laboratory of Marine Materials and Protective Technologies, Key Laboratory of Marine Materials and Related Technologies, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201 , China;2.Nano Science and Technology Institute, University of Science and Technology of China, Hefei 230026 , China
Abstract:
Al coatings were deposited on sintered NdFeB through arc ion plating technique. The effects of negative bias voltage and base vacuum degree on morphology, performance and deposition rate of the coatings were investigated by surface profilometer, SEM, LSCM, electrochemical workstation and salt spray chamber. Results show that the number and size of droplets on coatings decrease with the increase of negative bias voltage and base vacuum degree. The deposition rate is inversely proportional to the negative bias voltage and directly proportional to the base vacuum degree, and the maximum deposition rate is 4. 85 μm/ h at negative bias voltage of -100 V. The corrosion current density decreases and the resistance time to salt spray increases with the increase of negative bias volt- age and the base vacuum degree, and the Al/ NdFeB sample has a high corrosion resistance at negative bias voltage of -200 V.
Key words:  Al coating  arc ion plating  negative bias voltage  base vacuum degree  corrosion resistance