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磁控溅射Cr/CrN和Cr/CrN/CrAlN涂层的抗高温氧化性能
宋肖肖1, 李柯1, 赵婕宇2, 董艇舰1, 胡登科3, 陈亚军1
1.中国民航大学 中欧航空工程师学院, 天津 300300;2.国家知识产权局专利局 专利审查协作天津中心, 天津 300162;3.航天精工股份有限公司, 天津 300300
摘要:
为了提高航空紧固件涂层的高温工况防护能力,采用磁控溅射技术在钛合金表面分别制备 Cr/ CrN 交替涂层和 Cr/ CrN / CrAlN 涂层,研究氧化时间和氧化温度对涂层高温氧化性能影响。 利用 SEM、EDS 和 XRD 进行微观形貌和物相成分分析,采用热重法分析氧化增重量( w) 和氧化速率常数( k) ,使用显微硬度计测试涂层高温氧化后硬度。 结果表明:随着氧化时间和氧化温度的增加,涂层硬度均降低,但 Cr/ CrN / CrAlN 涂层下降趋势更缓; 两种涂层的 w 和 k 均上升,其中 Cr/ CrN / CrAlN 涂层 w 和 k 增幅均低于 Cr/ CrN 交替涂层,950 ℃ 氧化 96 h 后 Cr/ CrN / CrAlN 涂层和 Cr/ CrN 交替涂层的 w 值分别为 40 mg / cm 2 和 135. 7 mg / cm 2 ,其对应的 k 分别为 0. 1996 和 0. 4092,说明 Cr/ CrN / CrAlN 涂层抗高温氧化性更好。 Cr/ CrN / CrAlN 涂层活化能 Ea 值比 Cr/ CrN 交替涂层高 48. 5%,Cr/ CrN / CrAlN 涂层在高温下产生 Cr2O3 和 Al 2O3 的混合氧化物,结构更致密,Cr/ CrN / CrAlN 涂层抗高温氧化性能高于 Cr/ CrN 交替涂层。
关键词:  磁控溅射  Cr/ CrN  Cr/ CrN/ CrAlN  涂层  高温氧化  扩散机理
DOI:10.11933/j.issn.1007-9289.20190801001
分类号:TG174.444
文章编号:1007-9289(2020)01-0063-10
文献标识码:A
基金项目:中央高校基本科研业务费项目中国民航大学专项项目(3122019177)
High Temperature Oxidation Resistance of Magnetron Sputtered Cr / CrN and Cr / CrN/ CrAlN Coatings
Song Xiaoxiao1, Li Ke1, Zhao Jieyu2, Dong Tingjian1, Hu Dengke3, Chen Yajun1
1.Sino-European Institute of Aviation Engineering, Civil Aviation University of China, Tianjin 300300 , China;2.Patent Examination Cooperation(Tianjin) Center of the Patent Office, CNIPA, Tianjin 300162 , China;3.Aerospace Precision Manufacturing Co., Ltd. , Tianjin 300300 , China
Abstract:
To improve the aviation fastener coating’ s ability of high temperature protection, Cr/ CrN alternating coating and Cr/ CrN/ CrAlN coating were prepared on the surface of titanium alloy by magnetron sputtering to study the effect of oxidation time and temperature on high temperature oxidation performance. Micromorphology and phase composition analysis were done by using SEM, EDS and XRD, thermogravimetry was used to analyze the oxidation weight gain (w) and oxidation rate constant (k), and the hardness after high temperature oxidation of the coating was tested by using a microhardness tester. The result shows: firstly, with the increase of oxidation time and temperature, the hardness after high temperature oxidation of the coating decreases, but the Cr/ CrN/ CrAlN coating has a slower decline trend. Both the w and k of two coatings increased, the w and k of the Cr/ CrN/ CrAlN coating increased less than that of Cr/ CrN alternating coating. After 96 h oxidation at 950 ℃ , the w of Cr/ CrN/ CrAlN and Cr/ CrN alternating coating is 40 and 135. 7 mg / cm 2 , as for the k, it is 0. 1996 and 0. 4092, respectively. It indicated that the high temperature protection of Cr/ CrN/ CrAlN coating is better than that of Cr/ CrN alternating coating. And the activation energy(Ea) of Cr/ CrN/ CrAlN coating is 48. 5% higher than that of Cr/ CrN alternating coating because Cr/ CrN/ CrAlN coating produces a mixed oxide of Cr2O3 and Al 2O3 whose structure is denser. As a result, the high temperature oxidation performance of Cr/ CrN/ CrAlN coating is better than that of Cr/ CrN alternating coating
Key words:  magnetron sputtering  Cr/ CrN  Cr/ CrN/ CrAlN  coating  high temperature oxidation  diffusion mechanism