| 摘要: |
| 采用 MPCVD 技术,研究了 CO2 -CH4 -N2 体系中 N2 对纳米金刚石膜生长状态及晶界处 H 含量的影响。 利用 SEM,XRD,Raman,FTIR 及 TEM 对纳米金刚石膜的形貌、结构和质量进行研究,并利用 Raman 及 FTIR 对晶界处 H 的含量进行计算分析。 结果表明,N2 流量的增加会在促使纳米金刚石膜的晶粒团聚体从球状逐渐转变为针状的同时减小晶粒尺寸,并使择优取向由<111>转变为<110>。 随着 N2 流量的增加,纳米金刚石膜的质量也随之降低,但晶界处的 H 含量逐渐上升。 具有针状晶粒团聚体的纳米金刚石膜具有明显的金刚石相和晶体石墨相。 N2 流量的增加不仅可以有效降低纳米金刚石膜的晶粒尺寸,改变晶粒的团聚形态及择优取向,还可以显著增加晶界处 H 的含量,促进石墨相的生成。 |
| 关键词: 纳米金刚石膜 微波等离子体 生长结构 氢 晶界 |
| DOI：10.11933/j.issn.1007-9289.20190616001 |
| 分类号:TG174.444 |
| 文章编号:1007-9289(2020)01-0039-08 |
| 文献标识码:A |
| 基金项目:湖北省教育厅科学技术研究计划优秀中青年人才项目(Q20151517)； 武汉工程大学科学研究基金(K201506) |
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| Effects of N2 on Growth Structure and Amount of H in Grain Boundaries of Nanocrystalline Diamond Films |
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Wang Zhen, Weng Jun, Wang Jianhua, Liu Fan
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Key Laboratory of Plasma Chemistry and Advanced Materials of Hubei Province, Wuhan Institute of Technology, Wuhan 430205 , China
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| Abstract: |
| An investigation on the influence of N2 on the growth structure and the amount of H in the grain boundary of nanocrystalline diamond films have been carried out in a MPCVD apparatus. The morphology, texture and quality of the deposited nanocrystalline diamond films were evaluated by SEM, XRD and Raman spectroscopy, FTIR and TEM. The content of hydrogen in the grain boundaries of nanocrystalline diamond film was calculated with the results of Raman spectra and FTIR. Results show that with the increase of N2 , the shape of the grain clusters transforms from spherality to needle-like and the preferred orientation changs from <111>to<110>with the grain size and the quality decreasing dramatically. The amount of hydrogen, however, increases significantly with the increase of N2 in CO2 -CH4 -N2 gas mixtures. Besides that, diamond and crystal graphite are two main phases in the needle-like diamond films demonstrated by the results of TEM. The research indicates that increasing N2 in CO2 -CH4 -N2 gas mixtures is benefiting not only for the decrease of grain size and the transformation of the shape of the aggregates and the preferred orientation, but also for the increase of the amount of hydrogen in grain boundaries and inducing the production of crystal graphite in nanocrystalline diamond films. |
| Key words: nanocrystalline diamond films microwave plasma growth structure hydrogen grain boundary |
