| 摘要: |
| 研究了利用磁控溅射方法制备的柔性硬质纳米复合涂层。结果表明柔性硬质纳米复合涂层具有以下优异性能:是一类具有高硬度、高韧性以及抗裂纹性能的新型涂层;具有较高的硬度模量比(H/E*≥0.1, E*=E/(1-ν2))、弹性恢复系数(We≥60%)、压应力(σ<0)L,且少缺陷的微观结构;生长处于Thornton结构区域相图的T区。磁控溅射非常适合制备纳米复合涂层,文中将对其制备柔性纳米复合薄膜的机理做深入阐述。涂层生长主要受以下3个参数影响:涂层生长过程中吸收的能量Ep,其包含沉积原子携带的能量Eca和轰击离子携带等能量Ebi(Ep=Eca+Ebi),基体温度Ts和涂层材料的熔点Tm。柔性硬质涂层具有广泛的应用前景,如柔性保护涂层、柔性功能涂层、防脆性涂层开裂的柔性保护涂层以及柔性多层涂层。文中还将详细阐述低温磁控溅射制备柔性纳米复合涂层的原理,并阐述纳米复合涂层及其性能的发展趋势。 |
| 关键词: 硬质纳米复合涂层 微观结构 宏观应力 力学性能 能量 柔性 裂纹抑制 磁控溅射 |
| DOI：10.11933/j.issn.1007-9289.2016.03.001 |
| 分类号: |
| 基金项目:捷克资助局项目(P108/12/0393) |
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| Flexible Hard Nanocomposite Coatings |
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MUSIL Jindrich
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Department of Physics and NTIS, University of West Bohemia, CZ-30614 Plzen, Czech Republic
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| Abstract: |
| The article reports on flexible hard nanocomposite coatings prepared by magnetron sputtering. It is shown that the flexible hard nanocomposite coatings represent a new class of coatings which are simultaneously hard, tough and resistant to cracking, exhibit high values of the hardness H and effective Young's modulus E* ratio H/E*≥0.1, elastic recovery We≥60%, compressive macrostress σ<0 and dense, void-free microstructures, and are formed in the zone T of the Thornton's Structural zone model (SZM); here E*=E/(1-ν2), E is the Young's modulus and ν is the Poisson's ratio. The magnetron sputtering, which is a very powerful process used in the preparation of nanocomposite coatings, is described in detail. The basic principles of the formation of the flexible hard coatings are also described in detail. It is shown that the key parameters which determine the formation of these coatings are the energy Ep=Eca+Ebi delivered to the growing coating by condensing atoms (Eca) and bombarding ions (Ebi) (the non-equilibrium heating), the substrate heating controlled by the substrate temperature Ts (the equilibrium heating) and the melting temperature Tm of the coating material. The flexible hard coatings have a huge application potential. Four examples of flexible coatings are given: flexible protective coatings, flexible functional coatings, flexible over-layer preventing cracking of brittle coating and flexible multilayer coating. Also, the principle of low-temperature sputtering of flexible nanocomposite coatings is described in detail. Finally, trends for future development of these nanocomposite coatings with unique properties are given. |
| Key words: hard nanocomposite coatings microstructure macrostress mechanical properties energy flexibility resistance to cracking magnetron sputtering |
