| 摘要: |
| 为了提高烧结钕铁硼永磁材料的耐腐蚀性能，采用磁控溅射技术在钕铁硼表面制备了厚度约为14.0 μm的铝膜，使用循环氩离子轰击铝膜的方法制备了3个周期的多层铝膜。利用扫描电子显微镜(SEM)观察铝膜的表面和截面形貌，X射线衍射仪(XRD)表征膜层的晶体结构，采用中性盐雾试验测试膜层的耐盐雾腐蚀性能，研究循环氩离子轰击对铝膜层形貌、结构及耐中性盐雾腐蚀性能的影响。结果表明：与相同厚度的单层铝膜相比，3个周期的多层铝膜晶粒均匀细小，膜层的柱状晶结构被打断，内部形成了两个明显的界面；膜层沿（111）晶面择优生长；与厚度相同的单层Al膜相比，3个周期的多层Al膜的耐蚀性显著提高，其耐中性盐雾腐蚀时间可达到312 h。循环氩离子轰击铝膜的方法可以改善铝镀层的质量和耐盐雾腐蚀性能。 |
| 关键词: 钕铁硼 氩离子轰击 界面 耐腐蚀 |
| DOI：10.11933/j.issn.1007-9289.2015.01.008 |
| 分类号: |
| 基金项目: |
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| Influences of Cycles Argon Ion Bombardment on Structure and Properties of Al Films Deposited by Magnetron Sputtering |
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HU Fang, DAI Mingjiang, LIN Songsheng, HOU Huijun, SHI Qian, ZHAO Li1,2
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1. New Material Department, Guangdong General Research Institute of Industrial Technology (Guangzhou Research Institute of Nonferrous Metals), Guangzhou 510651;2. Guangdong Provincial Key Laboratory of Modern Surface Engineering Technology, Guangzhou 510651
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| Abstract: |
| In order to enhance the anticorrosion performance of sintered NdFeB，Al films with the thickness of about 14.0 μm were deposited on NdFeB magnets by magnetron sputtering technique. Threeperiod Al multilayer films were prepared by bombarding Al filmsurface using argon ion. The surface and cross section morphologies of the Al films were observed by scanning electron microscopy (SEM), the structure of Al films were characterized by Xray diffraction instrument (XRD), and the salt spray corrosion resistance was measured by neutral salt spray test. The influences of cyclic argon ion bombardment on the morphologies, structure and salt spray corrosion resistance of the Al films were mainly studied. The results show that the grains of the Al films after cycles argon ion bombardment are uniform and fine.The columnar crystal structure of the film is interrupted by argon ion bombardment, which can be formed into two distinct interfaces in the internal of aluminum films, a (111) plane preferred orientation is observed. The neutral salt spray (NSS) test revealed that threeperiod aluminum multilayers have much better corrosion resistance than the single aluminum layer with the same thickness. The anticorrosion time of neutral salt spray can reach to 312 h. The quality and anticorrosion performance of the Al films can be improved by the method of circulated argon ion bombardment. |
| Key words: NdFeB argon ion bombardment interface corrosion resistance |
