| 摘要: |
| 针对镍钛合金(NiTi)进行3种不同浓度Cr离子注入，采用扫描电子显微镜、三维白光形貌干涉仪、小角度掠射X射线衍射仪、X射线光电子能谱仪分析了离子注入前后镍钛合金表面形貌、粗糙度、组织结构及化合态。结果表明，随着注入Cr离子浓度的增大，镍钛合金表面更加平整，粗糙度变小。所有注入试样表面形成了近60 nm厚的注入膜层，主要成分为三氧化二铬和铬碳化合物，并且随Cr离子注入剂量的增加，三氧化二铬和铬碳化合物的含量增加。 |
| 关键词: 镍钛合金 Cr离子注入 表面改性 |
| DOI：10.3969/j.issn.1007-9289.2014.02.006 |
| 分类号: |
| 基金项目: |
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| Surface Structure of NiTi Alloy by Chromium Ion Implantation |
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LIU Fengbin, LI Huiping, CUI Yan, ZHAO Quanliang, LIU Bo, JING Bao
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College of Mechanical & Electric Engineering, North China University of Technology, Beijing 100144
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| Abstract: |
| Chromium ions with three different concentrations were implanted into nickel titanium (NiTi) alloy. By using scanning electron microscopy (SEM), threedimensional white light interferometer, grazing incident Xray diffraction (GIXRD) and Xray photoelectron spectroscopy (XPS), the surface topographies, microstructures and chemical states of the samples were analysized. The results show that Cr ion implantation can decrease the surface roughness of the original sample. An implantation layer with the thickness of 60 nm is formed after Cr ion implantations, which consist mainly of Cr2O3 and CrC phases. Along with the increase of the implanted Cr ions, the concentrations of the Cr2O3 and CrC phases also increase. |
| Key words: NiTi alloy chromium ion implantation surface modification |
