| 摘要: |
| 为了解工艺对多层涂层性能的影响，针对偏置电压对涂层中残余应力以及其相应摩擦性能的影响进行了研究，并通过更改工艺参数来制备优良的涂层系统并调整其残余应力。通过磁控溅射装置利用-75~-150 V的偏置电压把Cr/CrAlN多层涂层系统沉积到热作模具钢H11上。除对涂层进行了金像分析外，还使用X射线衍射来分析了其残余应力。通过扫描电子显微镜测定涂层的结构和形态，采用纳米压痕实验和球盘摩擦实验来验证来工艺参数对力学和摩擦性能的影响。结果表明，残余应力随着偏置电压的增加而增长，并导致了更致密和更无序的微观结构。由于涂层的致密，涂层的硬度和涂层的杨氏模量也急剧增加。摩擦学性能也随着偏置电压的增高进一步受到涂层表面形态以及高残余应力和高硬度组合的综合影响。 |
| 关键词: 多层涂层 偏置电压 残余应力 摩擦学性能 热锻压模具 |
| DOI： |
| 分类号: |
| 基金项目:德国合作研究中心项目(SFB "Transregio 30" TP A4 &Ti 343 / 341) |
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| Influence of Bias Voltage on Tribological Behavior and Residual Stresses of Cr/CrAlN Multilayer Systems |
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TILLMANN Wolfgang, SPRUTE Tobias, HOFFMANN Fabian, SELVADURAI Ursula, ZIELKE Reiner
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Institute of Materials Engineering, TU Dortmund University, Dortmund 44227, Germany
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| Abstract: |
| The influences of the bias voltage on the residual stresses, as well as on the tribological properties, were investigated within the scope of this work in order to understand the operational behavior of the graded multilayer system used. The Cr/CrAlN multilayer systems were deposited on hot working steel substrates by magnetron sputtering with varying bias voltages between -75 V and -150 V. In addition to the metallurgical phase analyses, residual stress evaluations were performed using Xray diffraction. The structure and morphology investigations of the coatings were determined by scanning electron microscopy. Furthermore, a nanoindenter and a ballondisk device were employed in order to characterize the mechanical and tribological properties and to clarify the effect of the process parameter on the service behavior of the PVD coating. It was shown that residual stresses increase with an increasing bias voltage, and resulted in a denser and more randomly orientated microstructure. Due to the refinement of the coating, both the hardness and Young’s modulus increase drastically. The tribogological behavior was further affected by the change of the topography as well as by the combination of high residual stresses and a high hardess with a rising bias voltage. |
| Key words: multilayer coatings bias voltage residual stresses tribological property hot forming tools0Introduction |
