| 摘要: |
| 利用涂饰技术调控弹性体材料的表面形貌，有助于提高表面材料的稳定性及相关器件的运行性能，同时为微纳米尺寸的图形制备提供参考。通过物理气相沉积法在弹性体PDMS(聚二甲基硅氧烷)衬底表面分别沉积了SiO2、MgF2及ZnS三种介电质材料并对各形貌的形成进行了分析。结果表明，通过在PDMS衬底表面蒸镀不同的介电质材料，可以形成褶皱、龟裂及平坦的表面形貌；通过光刻及软光刻技术在衬底表面预制具有周期性的凹状图形，可以对褶皱、龟裂的方向进行调控，使褶皱、龟裂等形貌呈有序性分布；通过对比介电质材料在加热冷却过程中所受的应力与临界应力的大小，可以方便地选择合适的介电质材料来制备所需的弹性体表面形貌。 |
| 关键词: 表面形貌 物理气相沉积 应力 |
| DOI： |
| 分类号: |
| 基金项目:教育部博士点基金（20093207110012） |
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| Changes of Surface Morphology by Coating Different Dielectric Layers on Elastomeric Polymer |
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WANG Bin, XU Huan-huan, ZHOU Zhen-ting
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School of Physics Science and Technology, Nanjing Normal University, Nanjing 210023
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| Abstract: |
| Regulating the surface morphology of elastomer material by coating technology is benefit to improve the stability of the materials and the performance of the devices, as well as the fabrication of micro/nano patterns. In this paper, three dielectric materials (SiO2, MgF2 and ZnS) are coated on polydimethylsiloxane (PDMS) by physical vapor deposition (PVD). The results indicate that wrinkles, cracks, and flat morphology are formed when different dielectric films are deposited on PDMS. The directions of wrinkles and cracks are determined by prefabricating periodic patterns on PDMS through lithography and soft lithography technology. By comparing the material stress during the process of heating and cooling with critical stress, suitable dielectric material can be easily chosen to prepare the materials with different surface morphologies. |
| Key words: surface morphology physical vapor deposition(PVD) stress |
