| 摘要: |
| 非晶碳氢（a-C∶H）薄膜作为空间润滑材料有很大的应用前景，它在真空中的摩擦磨损行为与掺杂元素、摩擦对偶、滑动速度等因素有关。采用中频非平衡磁控溅射法在AISI202不锈钢和p（111）单晶硅基体上沉积了厚度为1.3~1.6 μm的a-C∶H膜以及Cr、MoS2掺杂的a-C∶H复合膜。采用球盘摩擦试验机对3种膜的真空摩擦学行为进行了研究，摩擦性能较好的薄膜在真空中进行了GCr15、 Si3N4和C不同对偶以及100、500、1000 r/min的不同转速摩擦实验。结果表明：在沉积气压为5.3×10-1 Pa，Ar和CH4的气体流量比为1∶1，单纯溅射石墨靶(溅射电流12 A)的条件下，制备的a-C∶H薄膜在真空中的摩擦因数最低(0.005)，寿命相对最长；对偶对a-C∶H膜的摩擦因数影响不大，但薄膜的耐磨寿命随着对偶硬度的增加而降低；随着转速的增加，a-C∶H膜的摩擦因数和耐磨寿命均降低。 |
| 关键词: 非晶碳氢膜 掺杂膜 对偶 转速 |
| DOI： |
| 分类号: |
| 基金项目:国家自然科学基金（51275509,51175491）； 国家基础研究发展计划(973计划)（2013CB632300） |
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| Effect of Rotational Speeds and Mated Balls on the Vacuum Tribological Properties of a-C∶H film |
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WU Yan-xia, LI Hong-xuan, JI Li, YE Yin-ping, CHEN Jian-min, ZHOU Hui-di1,2
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1. State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000;2. Graduate University of Chinese Academy of Sciences, Beijing 100049
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| Abstract: |
| Amorphous hydrogenated carbon (a-C∶H) films have great application prospects as a space lubricant, the vacuum tribological properties of the film have related to the doping elements, frictional counterpart, sliding speed, etc. The a-C∶H and composite films with different dopants of Cr, MoS2 with a thickness of 1.3-1.5 μm were deposited on stainless (steel AISI202) and p(111) silicon substrates using a medium frequency unbalanced magnetron sputtering system. The vacuum tribological properties of a-C∶H film and films with different dopants (Cr, MoS2) were tested on a ball-on-disk tribometer. The effect of the mated balls and rotational speeds on the tribological properties of the amorphous carbon film were also investigated. The film with the best tribological properties was investigated with different counterparts (GCr15, Si3N4, and C) and rotational speeds (100, 500, and 1000 r/min). The results show that the pure a-C∶H film exhibits the lowest friction coefficient (0.005) and the longest wear lifetime. The counterpart ball has little effect on the friction coefficient even though the wear life of the film decreased with increasing hardness of the counterpart ball. Meanwhile, the friction coefficient and wear life decreases with increasing rotating speed. |
| Key words: amorphous hydrogenated carbon film doped film counterpart ball rotating speed |
