| 摘要: |
| 采用波长为172 nm 的真空紫外光刻蚀技术（VUV）对清洗后的PET基片表面性质直接进行微加工，并在其表面上进行选择性无电解镀银处理。通过对紫外光照处理前后的PET基片进行水接触角测试、XPS测试，表征了PET基片在处理前后所具有的不同表面状态。将在真空条件下通过紫外光选择性刻蚀的的PET基片放在化学镀银液中，被还原出来的金属银颗粒就会沉积在PET基片上的被辐射区域。利用光学显微镜和场发射SEM观察镀银后PET基片表面的微银图案。结果表明：紫外光照可使PET基片表面改性，利用真空紫外光刻蚀技术（VUV）对PET基片表面进行区域选择性改性，就可以实现无电解电镀银在PET基片上的选择性沉积，一次性制备出保真性较好的微米级镀银图案。 |
| 关键词: PET基片 真空紫外光刻 图案化 选择性 无电解镀银 |
| DOI： |
| 分类号: |
| 基金项目:国家自然科学基金（50973087/E0310） |
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| Fabrication of Micron Silver Patterns on Polymers Selectively Modified by UVlight |
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TANG Hong–xiao, WU Zhong–kui, YANG Jun, LI Shao–ying
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Wuhan University of Technology, School of Materials Science and Engineering, Wuhan 430070
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| Abstract: |
| PET surface was directly modified by ultraviolet lithography at a wavelength of 172 nm after being cleaned, on which the silver was selectively deposited by the method of eletroless silver plating. Water contact angle and XPS were performed on PET substrates before and after they were etched by vacuum ultraviolet lithography(VUV), so as to show the different morphology.By putting the PET films etched by vuv in the electroless plating silver solution,the reduced silver particles would deposite on the modified areas of the PET films. The silver patterns were observed under the optical microscope and the field emission electron microscope. The results show that VUV can be used to modify PET substrate, and by modifying the PET substrates selectively together with the subsequent electroless silver plating processing,the silver patterns can be fabricated. Finally, micron silver patterns with highfidelity are successfully prepared via one step manufacture. |
| Key words: PET substrates vacuum ultraviolet lithography(VUV) patterned selectivety electroless silver plating |
