| 摘要: |
| 采用LABVIEW软件控制N2气体流量，辅助中频磁控溅射制备不同占空比的（Al,Ti）N周期性多层膜，分别利用X射线衍射仪、场发射扫描电镜、纳米硬度仪研究了（Al,Ti）N周期性多层膜的组织结构和力学性能，研究表明：不同占空比下的薄膜只存在面心立方结构，多层膜具有一定的择优取向，择优取向随着占空比的改变而变化，当占空比为50%时，薄膜中存在（111）和（220）两种取向；多层的结构可以提高薄膜的结合强度和力学性能，获得的多层膜硬度最高为33.58 GPa，临界载荷在40 N左右，磨损情况也得到了明显的提高，主要是以粘合磨损为主；氮流量的增加有利于多层膜的性能改善。 |
| 关键词: LABVIEW 多层膜 射频磁控溅射 硬度 择优取向 |
| DOI： |
| 分类号: |
| 基金项目:宁波市自然科学基金项目（2009A610034） |
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| Structure and Mechanical Performance of （Al,Ti）N Periodical Multilayer Films Deposited by MF Magnetron Sputtering |
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SUN Li–li, YANG Hui–sheng, CHENG Hao, WANG Ai–ying1,2
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1.Ningbo Institute of Material Technology & Engineering, Chinese Academy of Sciences, Ningbo 315201;2.Department of Material Physics and Chemistry, University of Science and Technology Beijing, Beijing 100083
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| Abstract: |
| （Al,Ti）N multilayer films were grown by MF magnetron cosputtering with LABVIEW software controlling the flow of N2, the morphologies and mechanical properties of the films were characterized with Xray diffraction (XRD), scanning electron microscope (SEM) and nanoindenter, respectively. The results showed that only coexistence of cubic structures was observed at different duty ratios,（Al,Ti）N multilayer films showed the preferred orientation of crystals and the preferred orientation vary with duty ratios, when the duty ratio was 50%, (111) peak and (220) peak turned to be stronger. The mechanical properties and adhesion between the film and the substrate were enchanced because of the multilayer structure.The hardness was reached to 33.58 GPa and the critical load was around 40 N, meanwhile, the wear of multilayer films was obviously improved too, which are bonded in the course of wearing. The performance of multilayer films got better with the increase of N2 flow. |
| Key words: LABVIEW multilayer films MF magnetron sputtering hardness preferred orientation |
