| 摘要: |
| 利用中频磁控溅射方法，采用氧化锌镓ZGO(97.5 %ZnO+2.5 %Ga2O3)陶瓷靶材和SiC陶瓷靶材，制备了ZGO和SiC/ZGO复合薄膜。考察了制备SiC膜时的沉积时间、氩气压强、基底温度对其耐腐蚀保护性能的影响，同时考察了SiC薄膜对ZGO薄膜功能特性的影响。试验结果表明，提高溅射气体的压力可以增强SiC膜对ZGO薄膜的耐腐蚀保护作用，提高基底温度对提高SiC/ZGO的耐腐蚀性能的效果显著，SiC薄膜的存在对ZGO的红外反射性能有增强作用。基底温度260 ℃，沉积SiC膜160 s能对ZGO膜起到防腐保护作用。 |
| 关键词: 氧化锌镓薄膜 SiC薄膜 磁控溅射 耐腐蚀性 |
| DOI： |
| 分类号: |
| 基金项目: |
|
| A Study on the Corrosion Resistance Properties of SiC/ZGO Films to ZGO Film |
|
JI Yang-ling, ZHUANG Da-Ming, ZHANG Gong
|
|
Department of Mechanical Engineering, Tsinghua University, Beijing 100084, China
|
| Abstract: |
| ZGO and SiC/ZGO films were prepared by mid-frequency AC magnetron sputtering technique using ZGO (97.5%ZnO+2.5% Ga2O3) ceramic and SiC targets. The effects of deposition time, Ar pressure and substrate temperature for SiC growing on corrosion resistance of SiC/ZGO films were examined. The influences of SiC on the functional properties of ZGO were observed as well. The results showed that the increase of Ar pressure can enhance the corrosion-resistance of SiC films to ZGO film. The protection effect of SiC/ZGO was obviously promoted by increasing substrate temperature. SiC played a favorable effect for enhancing the infrared reflectivity of ZGO film. The SiC film showed the anti-corrosion performance to the ZGO film when the matrix temperature was 260℃ and the deposition time was 160 s. |
| Key words: ZGO film SiC film magnetron sputtering corrosion resistance infrared reflection |
