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摘要: |
采用无灯丝离子源结合非平衡磁控溅射的方法,大面积地在不同基体上制备了光滑、均匀的类金刚石(DLC)膜层,用SEM、Raman、XPS、硬度计、划痕仪等手段分析和研究了膜层的形貌、结构及部分性能。结果表明:钛的掺入,有利于减少内应力、提高膜/基结合力,膜层的综合性能好,更适合于精密器件的表面改性。 |
关键词: 类金刚石膜 无灯丝离子源 非平衡磁控溅射 大面积 |
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A Study on Diamond-Like Carbon Film Synthesized by Ion Source Technique |
DAI Ming-jiang1, LIN Song-sheng1,2, HOU hui-jun1, ZHU Xia-gao1, LI Hong-wu1, KUANG Min1
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Abstract: |
The large area diamond-like carbon(DLC)film was synthesized by ion source technique with magnetron sputtering of Ti metal,the film was analyzed by SEM,Raman,XPS,hardness and scratching testers.The results showed that Ti-doped DLC has better quality comparing with pure DLC film,it displays a higher bonding strength with substrate and can be made thicker. |
Key words: DLC magnetron sputtering ion source |