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| 摘要: |
| 采用无机溶胶-凝胶法制备了VO2热致变色薄膜，利用XPS系统地研究了烘干温度、真空热处理温度以及溶胶浓度对VO2薄膜中钒价态的影响。结果表明，保持其它工艺参数不变，薄膜中V^5 被还原的程度随烘干温度和真空热处理温度升高而增大。当烘干温度、烘干时间和真空热处理时间以及真空气压相同时，随溶胶浓度减小，VO2薄膜中V^5 被还原程度存在真空热处理温度临界点，当溶胶浓度配比为1：4～1：3时，临界温度为480℃；溶胶浓度配比为1：3～1：2时，临界温度为400℃。制备高纯VO2薄膜的优化工艺参数组合为溶胶浓度配比1：3，250℃干燥2h后于450℃氢气还原3h(保持真空度为0．5Pa)。 |
| 关键词: VO2薄膜 热致变色 溶胶－凝胶 XPS |
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| Study on Chemical States of VO2 Thin Films Prepared by Sol-gel Method |
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JIANG Shao-qun1, MA Xin-xin1, SUN Ming-ren2
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| Abstract: |
| Thermochromic vanadium dioxide films were prepared by the inorganic sol-gel method. The effects of process parameters such as drying temperature, vacuum heat treatment temperature and the sol concentration on the vanadium valences in the VO2 thin films were studied by X-ray photoelectron spectroscopy (XPS). It is shown that the extent of deoxidization of V5+ in the thin films becomes more severe with the increase of drying temperature and vacuum heat treatment temperature when the other process parameters are invariable. When the drying temperature, drying time, vacuum heat treatment time and vacuum pressure are same, there is a critical vacuum heat treatment temperature of the deoxidization extent of V5+ in the VO2 films with the decrease of sol concentration. The critical temperature is 480 ℃ when the sol concentration is 1︰4~1︰3. The critical temperature is 450 ℃ when sol concentration is 1︰3~1︰2. The optimized process parameters to prepare high pure VO2 thin films are sol concentration 1︰3, drying at 250 ℃, 2 h, vacuum heat treatment at 450 ℃, 3h and at the same time, keep the vacuum pressure 0.5 Pa. |
| Key words: VO2 thin films thermochromic sol-gel XPS |
