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| 摘要: |
| 概述了近年来制类金刚石膜的新技术如双射频辉光放电（RF－RF）法，射频－直流辉光放电（RF－DC）法和微波－射频（MW－RF）法等，并且对影响类金刚石膜制备及性能的因素如基体材料，制备类金刚石膜时在膜中添加元素，类金刚石膜与基材之间的中间层等进行了较全面的分析。 |
| 关键词: 类金刚石镀 制备方法 影响因素 |
| DOI： |
| 分类号:O484 |
| 基金项目:国家教委博士点基金资助项目,(1999056121) 广东省自然科学基金资助项目,(990548) |
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| Preparation and Influencing Factors of Diamond-like Carbon Films |
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CHEN Ling LIU Zheng-yi QIU Wan-qi HUANG Yuan-sheng
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| Abstract: |
| The new methods, such as RF-RF glow discharge plasma CVD, RF-DC glow discharge plasma CVD, MW-RF CVD etc. for producing diamond-like carbon films in recent years were reviewed. The influening factors, such as substrate materials, added chemical elements and intermediate layer, on diamond-like carbon films were also analyzed. |
| Key words: diamond-like carbon films,preparation techniques,influencing factors |
