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| 摘要: |
| 介绍了表面粗糙系数（Ｒｓ）及截面线波动系数（Ｒ１）的概念及它们之间的关系，以普通电弧喷涂，高速电弧喷涂ＦｅＣｒＮｉ涂层为例，介绍了计算Ｒｓ及ＲＬ的步骤，以及如何应用它们对表面薄膜层的形貌进行定量分析。 |
| 关键词: 表面粗糙系数 薄膜层 表面形貌 定量表征 |
| DOI： |
| 分类号:TB1 O484.5 |
| 基金项目: |
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| The Quantitative Description of the Surface Morphology of Thin Films |
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Liu Guimin Xu Binshi
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| Abstract: |
| The definitions of the parameters of surface roughness coefficient (R_S) and profile roughness coefficient (R_L) as well as the relationship between them are introduced in the present paper. The procedures for measuring and calculation of the values of R_L and R_S, as well as how to use them to quantitatively describe the surface morphology of thin films, are exemplified by the FeCrNi coatings deposited by arc spraying and high-velocity arc spraying technology. |
| Key words: Surface roughness coefficient (R_S), Profile roughness coefficient (R_L), Thin films. surface morphology, |
