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| 摘要: |
| 文章介绍新型柱状阴极电弧源多弧离子镀膜机的结构特点和镀氮化钛涂层的效果。 |
| 关键词: 柱状电弧源,多弧离子镀,TiC涂层 |
| DOI： |
| 分类号:TG174 |
| 基金项目: |
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| Multi Arc Ion Plating System by Columner Arc Source |
|
Wang Fuzhen
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| Abstract: |
| The article introduce to multi arc ion plating sgstem by columner arc source and introduce to microstructure'properties and thicks of plated TiN films |
| Key words: Multi arc ion plating,columner arc source,TiN films |