| 引用本文: | 谢启,柳子怡,付志强,康嘉杰,朱丽娜,佘丁顺.等离子体增强磁控溅射TiN涂层与铝对摩时的摩擦磨损行为∗[J].中国表面工程,2023,36(6):68~78 |
| XIE Qi,LIU Ziyi,FU Zhiqiang,KANG Jiajie,ZHU Lina,SHE Dingshun.Tribological Behavior of TiN Coatings Deposited by Plasma-enhanced Magnetron Sputtering Against Aluminum[J].China Surface Engineering,2023,36(6):68~78 |
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| 等离子体增强磁控溅射TiN涂层与铝对摩时的摩擦磨损行为∗ |
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谢启1,2, 柳子怡1, 付志强1,2, 康嘉杰1,2, 朱丽娜1,2, 佘丁顺1,2
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1.中国地质大学（北京）工程技术学院 北京 100083;2.中国地质大学（北京）郑州研究院 郑州 451283
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| 摘要: |
| 铝挤压模具表面的摩擦磨损行为是影响铝制品质量和模具寿命的重要因素。为了进一步优化铝挤压模具表面耐磨涂层的沉积工艺，以 TiN 涂层为例，采用等离子体增强磁控溅射方法分别在基体偏流为 0.1 A、1.5 A、3.0 A 和 4.5 A 条件下制备 TiN 涂层，利用 XPS、SEM、AFM 和 XRD 分别测量 TiN 涂层的化学成分、表截面微观结构和相组成，利用纳米压痕仪和旋转式球-盘摩擦磨损试验机分别考察 TiN 涂层试样的综合力学性能和与铝对摩时的摩擦磨损行为。结果表明：基体偏流增加对 TiN 涂层的化学组成影响较小。随着基体偏流的增加，TiN 涂层的横截面形貌逐渐细化。涂层表面具有由岛状微凸起组成的微结构，随着基体偏流的增加，微凸起尺寸和数量逐渐减小，表面粗糙度逐渐降低。不同基体偏流条件下制备的涂层均具有明显的 TiN(111)择优生长趋势。当基体偏流从 0.1 A 增加到 1.5 A 时，TiN 涂层的晶粒尺寸明显减小，涂层的综合力学性能得到显著提高。TiN 涂层试样与铝对摩过程中主要发生粘着磨损和磨料磨损，涂层试样对铝的减摩抗磨性能与对摩过程中的铝粘着面积呈负相关。结论：基体偏流对等离子体增强磁控溅射 TiN 涂层的表截面微观结构、力学性能和摩擦磨损行为影响显著，基体偏流为 1.5 A 时制备的 TiN 涂层具有最低的摩擦因数和磨损率，分别为 0.41×10?15 和 3.03×10?15 m3 / (N·m)。研究结果对铝成型模具表面高性能长寿命防护涂层的研究开发具有一定的理论意义和实用价值。 |
| 关键词: 磁控溅射 涂层 微观组织 摩擦学 挤压 |
| DOI：10.11933/j.issn.1007-9289.20221231001 |
| 分类号:TG156；TB43 |
| 基金项目:国家自然科学基金资助项目（52175196, 51775524） |
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| Tribological Behavior of TiN Coatings Deposited by Plasma-enhanced Magnetron Sputtering Against Aluminum |
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XIE Qi1,2, LIU Ziyi1, FU Zhiqiang1,2, KANG Jiajie1,2, ZHU Lina1,2, SHE Dingshun1,2
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1.School of Engineering and Technology, China University of Geosciences (Beijing), Beijing 100083 , China;2.Zhengzhou Institute, China University of Geosciences (Beijing), Zhengzhou 451283 , China
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| Abstract: |
| The friction and wear performances of aluminum extrusion die surfaces are important factors affecting the quality of aluminum or aluminum alloy products and the life of extrusion dies. The deposition of wear-resistant films on the surface of extraction dies is one of the most effective strategies, and the friction and wear performances of different coatings against aluminum have been previously investigated. However, studies regarding the influence of the coating microstructure on the tribological behavior of the same coating material when applied against aluminum remain limited. Plasma-enhanced magnetron sputtering introduces an extra electron-emitting source into conventional magnetron sputtering equipment to obtain a densified and controllable plasma around the substrates, producing wear-resistant coatings with similar compositions but significantly different microstructures. The TiN coating, which is a widely used wear-resistant coating, is selected as an example and deposited by plasma-enhanced magnetron sputtering at various substrate bias currents to obtain coatings with different microstructures. The effect of the substrate bias current on the microstructure, mechanical properties, and tribological behavior of the TiN coatings against aluminum is systematically investigated to further optimize the deposition process of the wear-resistant TiN coating applied on aluminum extrusion dies. The TiN coating is prepared using plasma-enhanced magnetron sputtering under varied substrate bias currents of 0.1 A, 1.5 A, 3.0 A, and 4.5 A. The chemical compositions of the TiN coatings are analyzed using X-ray photoelectron spectroscopy (XPS). The surface and cross-sectional morphologies of the coatings are observed using scanning electron microscopy (SEM). The 3D surface microstructure and surface roughness of the coatings are studied using atomic force microscopy (AFM). The phase structures of the coatings are determined using X-ray diffraction (XRD). The comprehensive mechanical properties and tribological behavior of the TiN-coated samples against aluminum are investigated using a nano-indenter and a rotary ball-on-disk friction and wear tester, respectively. The surface morphologies and chemical compositions of the wear tracks are analyzed using laser confocal microscopy, SEM, and EDS. The results show that the variation in the substrate bias current has little impact on the chemical composition of the TiN coatings deposited by plasma-enhanced magnetron sputtering, and all the coatings have a nearly stoichiometric composition. The cross-sectional microstructure of the TiN coating is gradually refined with an increasing substrate bias current, and the surface microstructure of the coating is consisting of island-like microprojections. When the substrate bias current increases from 0.1 A to 4.5 A, the size and amount of the microprojection are gradually decreased along with the surface roughness (from 77.67 nm to 15.67 nm). The preferred growth along the TiN(111) direction dominates in all the coatings, and it is further enhanced when the substrate bias current reaches 3.0 A. The grain size of the TiN coating is pronounced decreased from 44 nm to 11 nm as the substrate bias current increases from 0.1 A to 1.5 A, and the comprehensive mechanical properties of the TiN coating are significantly improved. When the substrate bias current is further increased, the effect of the substrate bias current on the grain size and the mechanical properties of the coatings becomes unobvious. Adhesive and abrasive wear are dominated in the wear process against aluminum of TiN-coated samples, and the friction-reduction and wear-resistance performance of the TiN-coated samples is negatively correlated with the aluminum adhesion area. In conclusion, the substrate bias current plays an important role in controlling the surface cross-sectional microstructure, grain size, mechanical properties and tribological behavior of the TiN coatings deposited by plasma-enhanced magnetron sputtering. When deposited at a substrate bias current of 1.5 A, the TiN coating with excellent mechanical properties and a rough surface microstructure has the lowest friction factor and wear rate of 0.41×10?15 and 3.03×10?15 m3 / (N·m), respectively. This study is theoretically significant and practically valuable for the research and development of high-performance and long-life protective coatings on the surfaces of aluminum-forming dies. |
| Key words: magnetron sputtering coatings microstructure tribology extrusion |
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