| 引用本文: | 畅为航,蔡海潮,雷贤卿,薛玉君,李航.磁控溅射(AlCrNbTiVCe)N涂层的高温摩擦学机理*[J].中国表面工程,2023,36(5):131~141 |
| CHANG Weihang,CAI Haichao,LEI Xianqing,XUE Yujun,LI Hang.High-temperature Tribological Mechanism of (AlCrNbTiVCe)N Coating with Magnetron Sputtering[J].China Surface Engineering,2023,36(5):131~141 |
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| 磁控溅射(AlCrNbTiVCe)N涂层的高温摩擦学机理* |
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畅为航1,2,3, 蔡海潮1,4, 雷贤卿1, 薛玉君1,2,4, 李航1,2
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1.河南科技大学机电工程学院 洛阳 471003;2.河南省机械设计及传动系统重点实验室 洛阳 471003;3.南阳理工学院智能制造学院 南阳 473004;4.龙门实验室 洛阳 471000
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| 摘要: |
| 高熵合金涂层作为航空发动机轴承防护涂层有重大的潜在应用价值，鉴于其服役环境日益严苛复杂，进一步提高涂层的高温摩擦学性能是十分必要的。通过非平衡射频磁控溅射技术制备含 Ce 元素的（AlCrNbTiVCe）N 涂层，利用扫描电子显微镜（SEM）、X 射线衍射仪（XRD）和 X 射线光电子能谱仪（XPS）表征涂层磨损后的微观形貌、物相和价态，用纳米压痕仪、球盘式摩擦磨损试验机测试涂层的力学性能和摩擦学性能，探讨 Ce 对涂层微观结构、高温稳定性和摩擦磨损的影响与机制。结果表明，（AlCrNbTiVCe）N 涂层主要由多元金属氮化物和单质 Ce 相组成。引入 Ce 元素改善了涂层组织结构， 提高了高温抗软化能力，有助于涂层摩擦磨损性能的改善。与不含 Ce 的涂层相比，500 ℃下（AlCrNbTiVCe）N 涂层的摩擦因数和磨损率分别下降 27.5%和 45.6%，其氧化磨损占主要磨损机制。该涂层高温摩擦学性能的提升主要是由于高温摩擦过程中涂层表面生成了氧化铈，增强了高温稳定性；氧化铈具有润滑特性，起到了减磨耐磨作用。在磁控溅射制备高熵涂层中， 引入稀土元素，可为提高涂层高温摩擦学性能的提供借鉴。 |
| 关键词: 磁控溅射 Ce 元素 (AlCrNbTiVCe)N 涂层 高温 减摩耐磨 |
| DOI：10.11933/j.issn.1007?9289.20221104002 |
| 分类号:TG135 |
| 基金项目:国家重点研发计划（2021YFB3400401）；河南省科技攻关（202102210073）资助项目 |
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| High-temperature Tribological Mechanism of (AlCrNbTiVCe)N Coating with Magnetron Sputtering |
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CHANG Weihang1,2,3, CAI Haichao1,4, LEI Xianqing1, XUE Yujun1,2,4, LI Hang1,2
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1.School of Mechatronics Engineering, Henan University of Science and Technology, Luoyang 471003 , China;2.Henan Key Laboratory for Machinery Design and Transmission System, Luoyang 471003 , China;3.School of Intelligent Manufacturing, Nanyang Institute of Technology, Nanyang 473004 , China;4.Longmen Laboratory, Luoyang 471000 , China
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| Abstract: |
| Advanced surface-modification technology with magnetron sputtering of a several-micron-thick hard ceramic coating has been widely used in industry owing to its high hardness and toughness, good oxidation and corrosion resistance, wear resistance, and excellent adhesion to substrates. High-entropy alloy coatings have high hardness and outstanding wear resistance and corrosion resistance, with broad applications in material protection of aviation engine bearings. With the increasingly harsh and complex service environment, it is necessary to further improve the high-temperature tribological performance of the coatings. (AlCrNbTiVCe)N coatings with added Ce were prepared by unbalanced magnetron sputtering. The sputtering targets were AlCrNbTiV (1:1:1:1:1) and CeAl alloy (5:5 Ce: Al); 9Cr18 steel was selected as the substrate. A Cr transition layer was deposited for 20 min to improve the adhesion of the coating to the substrate. The main process parameters were set as follows: the vacuum pressure was 5×10?4 Pa; the deposition temperature was 300 °C; the total coating-deposition time was 180 min. Scanning electron microscopy (SEM), x-ray diffraction (XRD), and x-ray photoelectron spectroscopy (XPS) were used to characterize the microstructure, phases, and bonding states of the coatings. The mechanical properties and friction and wear properties of the coatings were tested using nano-indentation and a tribometer. The wear rates were used to evaluate the wear performances of the coatings; three tests were averaged to reduce the error. The effects of cerium on microstructure and high-temperature friction were investigated. The results showed that the (AlCrNbTiVCe)N coating consisted of multiple metal nitrides and Ce phases. The addition of Ce played a role in refining grains, increasing density and hardness, and improving high-temperature stability and friction and wear performance. At high temperature, the H and E of the (AlCrNbTiVCe)N coating were 29.8 GPa and 259.6 GPa, respectively. The friction coefficient of the (AlCrNbTiVCe)N coating was as low as approximately 0.29, and the wear rate was as low as 4.1×10?6 mm3 / (N·m). The friction coefficient and wear rate of the (AlCrNbTiVCe)N coating at 500 ℃ decreased by 27.5% and 45.6%, respectively, compared with a free-Ce coating. Addition of Ce improved the microstructure of the coating, enhanced the high-temperature softening resistance, and improved the high-temperature friction and wear properties of the coating. In the (AlCrNbTiVCe)N coating, Ce atoms have a strong attraction to the electrons of the atoms around them, especially for O atoms, compared with Al, Cr, Nb, Ti, and V. The Gibbs free energy is very low for formation of cerium-based oxides. With diffusion of O atoms into the coating, the energy is sufficient for Ce to form cerium oxide, easily generating CeO2 and reducing the outward diffusion rate of Al and Cr cations along the grain boundary of the oxide film. The oxidation rate slows, and the lifespan of Al2O3 and Cr2O3 oxide films is extended, enhancing self-healing ability and improving resistance to softening and thermal stability. The CeO2 generated at the wear mark has a lubricating effect, which is beneficial for reducing the adhesion between the friction pairs and reducing friction. The wear mechanism is mainly formation of the lubricating film and oxidation wear. The improved high-temperature tribological performance of the (AlCrNbTiVCe)N coating is mainly due to formation of cerium oxide on the surface of the coating during high-temperature friction, which enhances high-temperature stability, has lubricating properties, and plays a role in reducing wear. Introduction of rare-earth elements in preparation of high-entropy coatings can provide a reference for improving the high-temperature tribological properties of coatings using magnetron sputtering. |
| Key words: magnetron sputtering Ce element (AlCrNbTiVCe)N coating high-temperature friction reduction and anti-wear |
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