| 引用本文: | 魏晨阳,白琴,郭鹏,柯培玲,王振玉,李昊,汪爱英.HiPIMS占空比对Al合金表面Ti/DLC涂层力学和摩擦性能的影响*[J].中国表面工程,2023,36(4):77~88 |
| WEI Chenyang,BAI Qin,GUO Peng,KE Peiling,WANG Zhenyu,LI Hao,WANG Aiying.Effect of Duty Ratio on Structure, Mechanical and Frictional Properties of Ti / DLC Coatings on Al Alloy via HiPIMS[J].China Surface Engineering,2023,36(4):77~88 |
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| HiPIMS占空比对Al合金表面Ti/DLC涂层力学和摩擦性能的影响* |
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魏晨阳1,2, 白琴1, 郭鹏2, 柯培玲2, 王振玉2, 李昊2, 汪爱英2
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1.上海大学材料科学与工程学院 上海 200072;2.中国科学院宁波材料技术与工程研究所 宁波 315201
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| 摘要: |
| 类金刚石涂层（DLC）兼具高硬度、耐摩擦磨损和高化学惰性等优点，是理想的 Al 合金零部件耐磨防护材料之一。 然而受限于 Al 合金与 DLC 间力学性能差异大，摩擦工况下承受复杂的耦合载荷作用，易导致涂层剥落失效。通过改变高功率脉冲磁控溅射技术（HiPIMS）的电源占空比（2%~10%），设计具有不同结构的 Ti 过渡层，系统研究 Al 合金基体上不同过渡层界面结构对 DLC 力学及摩擦性能的影响。结果表明，随 HiPIMS 占空比增加，所有 Ti 过渡层取向从（100）向（002） 转变。相比直流磁控溅射 Ti 过渡层，HiPiMS 技术可以降低晶粒尺寸以及提高 Ti 层致密性，令 Ti 过渡层具备更强的承载能力，涂层摩擦寿命提升了约 4.5 倍。沉积具有低（100）择优取向和致密结构的 Ti 过渡层是实现 Al 合金表面高性能 Ti / DLC 涂层的关键，对解决 Al 合金零部件表面硬质涂层易剥落失效等问题提供了新思路。 |
| 关键词: Al 合金 Ti / DLC 涂层 HiPIMS 择优取向 致密性 摩擦磨损行为 |
| DOI：10.11933/j.issn.1007?9289.20221102001 |
| 分类号:TG156；TB114 |
| 基金项目:国家杰出青年科学（52025014）；中国科学院-韩国国家科技理事会协议（174433KYSB20200021）；浙江省自然科学基金（LGG22E010011）；宁波市科技创新 2025 重大专项（2022Z054）资助项目 |
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| Effect of Duty Ratio on Structure, Mechanical and Frictional Properties of Ti / DLC Coatings on Al Alloy via HiPIMS |
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WEI Chenyang1,2, BAI Qin1, GUO Peng2, KE Peiling2, WANG Zhenyu2, LI Hao2, WANG Aiying2
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1.College of Materials Science and Engineering, Shanghai University, Shanghai 200072 , China;2.Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences,Ningbo 315201 , China
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| Abstract: |
| Aluminum alloys are lightweight materials with a range of excellent properties and extensive applications. Due to their high specific strength, exceptional low-temperature toughness, corrosion resistance, and ease of processing, aluminum alloys have promising potential in fields such as aerospace and transportation. However, the low hardness and poor wear resistance of aluminum alloys can significantly impact the longevity and safe operation of some high-performance equipment. Diamond-like carbon (DLC) coatings exhibit high hardness, wear resistance, and chemical inertness, making them ideal wear-resistant protective coatings for aluminum alloy components. Nevertheless, the differences in mechanical properties between aluminum alloys and DLC coatings can cause the Al / DLC alloy system to face changing loads under frictional operating conditions, which can lead to DLC failure. In this study, 1-μm thick DLC coatings were prepared using a linear ion beam. Titanium transition layers with varying structures were deposited by adjusting the duty ratio (2%–10%) of high-power pulsed magnetron sputtering technology (HiPIMS). The effects of different interface structures of transition layers on the mechanical and friction properties of the Al / DLC system were systematically investigated. A coating prepared using the DC magnetron sputtering technique served as a control group. SEM and TEM were used to observe the surface and cross-sectional morphology of the coatings. Raman spectroscopy was employed to characterize the bonding structure of DLC. The changes in coating surface roughness were determined using AFM. Nano-indentation tests provided the hardness and elastic modulus of the coatings. The tribological properties of the coatings were assessed using ball-disk friction equipment. Results showed that the bonding structure of DLC was not affected by the titanium transition layer structure. All titanium layers exhibited a distinct columnar structure. As the duty ratio increased, the decrease in peak power led to a reduction in titanium ion energy, and all titanium layers were oriented from (100) to (002) due to surface energy minimization. The roughness of the top layer DLC changed as a result of the titanium layer structure (Ra = 10.6–14.5 nm). Scratch tests revealed that samples prepared via HiPIMS (8.4–8.6 N) demonstrated higher adhesion strength than those prepared by DC (7.0 N). Furthermore, the change in duty ratio had no significant effect on the adhesion of HiPIMS samples. Friction experiments showed that the average friction coefficient of the DC sample was 0.15, while that of the HiPIMS sample was 0.07. Different amounts of amorphous carbon transfer films were observed adhering to the Al2O3 ball. Compared with the sample prepared via DC, HiPiMS can simultaneously reduce the grain size and increase the proportion of (002) plane, providing the coating with a stronger bearing capacity and significantly improving its mechanical and tribological properties (samples with a duty ratio of 8% exhibited a hardness of approximately 29.9 GPa, a modulus of 220.6 GPa, H / E and H3 / E2 values of 0.136 and 0.550 GPa, respectively, and the lowest friction coefficient and wear rate of 0.07 and 4.5×10?7 mm3 / (N·m), respectively). The failure modes of all coatings during friction testing were similar, consisting of tensile cracks and flake spalling due to frictional shear stress. Trenches parallel to the loading direction were observed in the friction traces. Thus, depositing a titanium transition layer with a low (100) preferred orientation and dense structure is key to preparing high-performance Ti / DLC coatings on aluminum alloys. This approach offers a novel solution to address the issue of easy peeling of wear-resistant coatings on aluminum alloy components. |
| Key words: Al alloy Ti / DLC coating HiPIMS preferred orientation compactness friction and wear behavior |
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