引用本文:周定伟,李忠昌,王振玉,马冠水,柯培玲,胡晓君,汪爱英.HiPIMS复合热处理制备高纯Ti2AlC MAX相涂层[J].中国表面工程,2022,35(5):236~245
ZHOU Dingwei,LI Zhongchang,WANG Zhenyu,MA Guanshui,KE Peiling,HU Xiaojun,WANG Aiying.High Purity Ti2AlC MAX Phase Coatings Deposited By HiPIMS Technique Combined With Subsequent Heat Treatment[J].China Surface Engineering,2022,35(5):236~245
【打印本页】   【HTML】   【下载PDF全文】   【查看/发表评论】  【EndNote】   【RefMan】   【BibTex】
←前一篇|后一篇→ 过刊浏览    高级检索
本文已被：浏览 669次   下载 336次 本文二维码信息
码上扫一扫！
分享到： 微信 更多
字体:加大+|默认|缩小-
HiPIMS复合热处理制备高纯Ti2AlC MAX相涂层
周定伟1,2, 李忠昌2, 王振玉2, 马冠水2, 柯培玲2, 胡晓君1, 汪爱英2
1.浙江工业大学材料科学与工程学院 杭州 310000;2.中国科学院宁波材料技术与工程研究 宁波 315201
摘要:
Ti2AlC MAX 相涂层是一类兼具金属和陶瓷特性的具有密排六方结构的高性能陶瓷涂层，在电接触、高温防护、宽温域摩擦等领域具有广阔的应用前景。然而 MAX 相涂层的成相成分窗口窄，性能受杂质相影响大，实现高纯、致密 Ti2AlC MAX 相涂层的制备目前仍存在挑战。考虑沉积气压与溅射等离子体能量密切相关，采用高功率脉冲复合直流磁控溅射技术在钛合金基体上制备了 TiAl / Ti-Al-C 涂层，经后续热处理退火得到高纯 Ti2AlC MAX 相涂层，重点研究不同沉积气压对涂层退火前后的成分、微观结构以及力学性能的影响和作用机制。结果表明，随着气压不断增大，沉积态涂层厚度先增加后减少。其中低沉积气压下沉积态涂层退火后，结构中除了 Ti2AlC MAX 相外，还含有一定量杂质相；而在高气压下沉积态涂层退火后几乎全部转变为 Ti2AlC MAX 相，呈现高纯、表面光滑致密的 MAX 相涂层特征。相较于沉积态涂层，退火后的涂层硬度变化不大，但由于生成了 Ti2AlC MAX 相，涂层弹性模量有所提高。
关键词:  高功率脉冲磁控溅射技术(HiPIMS)  MAX 相  Ti2AlC  热处理  力学性能
DOI：10.11933/j.issn.1007?9289.20220104004
分类号:TG174
基金项目:国家自然科学基金(52025014, 52171090, 51901238)和宁波市自然科学基金(202003N4025)资助项目
High Purity Ti2AlC MAX Phase Coatings Deposited By HiPIMS Technique Combined With Subsequent Heat Treatment
ZHOU Dingwei1,2, LI Zhongchang2, WANG Zhenyu2, MA Guanshui2, KE Peiling2, HU Xiaojun1, WANG Aiying2
1.College of Materials Science and Engineering, Zhejiang University of Technology, Hangzhou 310000 , China;2.Ningbo Institute of Materials Technology and Engineering,Chinese Academy of Sciences,Ningbo 315201 , China
Abstract:
Ti2AlC MAX phase coating is a kind of high-performance ceramic coating with dense hexagonal structure, which benefits the combined superior properties from metals and ceramics and the promising applications in electric contact, high temperature protection etc. However, due to the narrow formation and the high deposition temperature of MAX phase, it is still an open challenge to realize the Ti2AlC MAX phase coating with high purity and dense structure. Therefore, the TiAl / Ti-Al-C coating is firstly deposited on titanium alloy substrate by a home-made high-power pulsed magnetron sputtering technology, where the subsequent heat treatment is performed to fabricate the high-purity Ti2AlC MAX phase coating. In particularly, the composition, structure and mechanical properties of the Ti2AlC MAX phase coating is investigated as a function of working pressure during deposition. The results show that increasing the pressure lead to the first increase and then the decrease of deposited coating thickness. After annealing, the coating obtained under low deposition pressure except Ti2AlC MAX phase, the structure also contains a certain amount of impurity phase. However, the coating prepared under high deposition pressure presents the high purity Ti2AlC MAX phase and the compact smooth surface after annealing. Note that the hardness of coating is slightly deteriorated after annealing, while the elastic modulus is improved due to the laminar structural formation of Ti2AlC MAX phase coatings.
Key words:  high-power pulsed magnetron sputtering (HiPIMS)  MAX  Ti2AlC  heat treatment  mechanical properties
手机扫一扫看