| 引用本文: | 黄盛辉,罗扬威,汤皎宁,谷坤明.低温制备MAX相薄膜:成相与性能研究进展∗[J].中国表面工程,2021,34(6):45~58 |
| HUANG Shenghui,LUO Yangwei,TANG Jiaoning,GU Kunming.Preparation of MAX Phase Films at Low Temperature: Research Progress of Phase Formation and Properties[J].China Surface Engineering,2021,34(6):45~58 |
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| 摘要: |
| MAX 相薄膜材料是材料研究的热点之一。 综述了 MAX 相薄膜的制备技术,介绍了典型的促进 MAX 相薄膜低温成相的方法,分析讨论了低温沉积 MAX 相薄膜的影响因素和生长机理,指出 MAX 相薄膜的制备难点主要是在降低温度和减少杂质相的生成。 统计并对比分析了文献中 MAX 相薄膜材料的几项主要使用性能的数据,包括导电性、耐腐蚀性能、硬度和模量,指出 MAX 相薄膜材料的耐腐蚀性能数据还不够充分和系统,甚至存在一定的不一致性,对其耐腐蚀性能的行为和机理需要更多的研究。 |
| 关键词: MAX 相薄膜 低温沉积技术 导电性 耐磨蚀性 |
| DOI：10.11933/j.issn.1007-9289.20210609001 |
| 分类号:TG174 |
| 基金项目:国家自然科学基金(51978410)；深圳市高等院校稳定支持计划(20200813121150001)资助项目 |
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| Preparation of MAX Phase Films at Low Temperature: Research Progress of Phase Formation and Properties |
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HUANG Shenghui, LUO Yangwei, TANG Jiaoning, GU Kunming
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College of Material Science and Engineering, Shenzhen University, Shenzhen 518060 , China
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| Abstract: |
| MAX phase thin film materials are one of the hotspots of materials research. The preparation technology of MAX phase film is reviewed, the typical methods to promote MAX phase film formation at low temperature in the literature are introduced, and the influencing factors and growth mechanism of low temperature deposition MAX phase film are analyzed and discussed. It is pointed out that the main difficulties in the preparation of MAX phase film are lower the temperature and reduce the generation of impurity phases. Statistics and comparative analysis of the several main performance data of MAX phase film materials in the literature, including electrical conductivity, corrosion resistance, hardness and modulus, point out that the corrosion resistance data of MAX phase film materials are not sufficient and systematic, even there is a certain inconsistency, and more research is needed on the behavior and mechanism of its corrosion resistance. |
| Key words: MAX phase films low temperature deposition technology electrical conductivity corrosion resistance |
