引用本文:李玉海,白清顺,杨德伦,张鹏,卢礼华,张飞虎,袁晓东.铝合金表面有机污染物等离子体清洗机理及验证[J].中国表面工程,2020,33(6):58~67
Li Yuhai,Bai Qingshun,Yang Delun,Zhang Peng,Lu Lihua,Zhang Feihu,Yuan Xiaodong.Mechanism and Verification of Plasma Cleaning of Organic Contaminant on Aluminum Alloy Surface[J].China Surface Engineering,2020,33(6):58~67
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铝合金表面有机污染物等离子体清洗机理及验证
李玉海1,2, 白清顺1, 杨德伦1, 张鹏1, 卢礼华1, 张飞虎1, 袁晓东2
1.哈尔滨工业大学 机电工程学院, 哈尔滨 150000;2.中国工程物理研究院 激光聚变研究中心, 绵阳 621900
摘要:
针对惯性约束核聚变装置中铝合金零件表面的有机污染去除问题,提出大气常压等离子清洗方式。 通过有限元方法研究等离子清洗机理,并通过铝合金零件的清洗试验进行验证,从而实现聚变装置中机械零件的超洁净制造。 研究结果表明:通过建立等离子表面清洗的热力学耦合方程,仿真分析得到清洗应力随清洗距离的减小而增大, 随清洗速度和基体厚度的增大而减小。 通过试验验证了铝合金零件在等离子清洗后表面自由能增大,极性分量与色散分量都有所增加,并且在等离子清洗过程中清洗的距离比清洗速度对清洗效果影响更大,清洗距离为 5 mm 时最好。
关键词:  有机污染物  等离子体  清洗  铝合金  超洁净制造
DOI：10.11933/j.issn.1007-9289.20200713002
分类号:TG174.442
文章编号:1007-9289(2020)06-0058-10
文献标识码:A
基金项目:国家自然科学基金(51535003)； 国家自然科学基金委员会-中国工程物理研究院 NSAF 联合基金(U2030109)
Mechanism and Verification of Plasma Cleaning of Organic Contaminant on Aluminum Alloy Surface
Li Yuhai1,2, Bai Qingshun1, Yang Delun1, Zhang Peng1, Lu Lihua1, Zhang Feihu1, Yuan Xiaodong2
1.School of Mechanical and Electrical Engineering, Harbin Institute of Technology, Harbin 150000 , China;2.Laser Fusion Research Center, China Academy of Engineering Physics, Mianyang 621900 , China
Abstract:
In order to remove the organic contamination on the surface of aluminum alloy elements in the inertial confinement fusion facility, the atmospheric pressure plasma cleaning method is proposed. The plasma cleaning mechanism was studied by fi- nite element method and verified by the cleaning experiment of aluminum alloy elements, so as to realize the ultra-clean manufac- turing of mechanical elements in the fusion facility. Results show that the cleaning stress increases with the decrease of cleaning distance and decreases with the increase of cleaning speed and matrix thickness by establishing the thermodynamic coupling e- quation of plasma surface cleaning. Experiments have verified that the surface free energy of aluminum alloy elements increases after plasma cleaning, and both polarity and dispersion components increase. Moreover, the cleaning distance in the plasma cleaning process has a greater impact on the cleaning effect than the cleaning speed. It is shown that the best cleaning effect can be obtained at cleaning distance of 5 mm.
Key words:  organic contaminant  plasma  cleaning  aluminum alloy  ultra-clean manufacturing
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