| 引用本文: | 周陶，袁军堂，黄雷，汪振华.线性离子束制备DLC薄膜的结构和性能[J].中国表面工程,2015,28(6):48~54 |
| ZHOU Tao, YUAN Juntang, HUANG Lei, WANG Zhenhua.Structure and Properties of DLC Films Prepared by Linear Ion Source Technology[J].China Surface Engineering,2015,28(6):48~54 |
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| 摘要: |
| 为研究线性离子束技术在不同基体材料上沉积DLC薄膜的结构和性能，分别在YG6硬质合金、SKD11不锈钢和T7451铝合金表面沉积DLC（类金刚石）薄膜，并采用Cr作为过渡层，缓解膜基不匹配性。通过原子力显微镜、台阶仪和Raman光谱研究薄膜的表面形貌和微观结构；利用划痕仪和摩擦磨损试验机对薄膜膜基结合强度及耐磨性进行测试。结果表明：采用该技术制备的DLC薄膜均匀光滑，表面粗糙度Ra仅为5.5 nm；DLC/Cr/SKD11膜系的ID/IG值低于DLC/Cr/YG6膜系和DLC/Cr/T7451膜系，说明沉积于SKD11表面的DLC含有较多的sp3C；DLC/Cr/SKD11和DLC/Cr/T7451膜系膜基结合强度为42.2 N和23.2 N，而DLC/Cr/YG6膜系在120 N载荷范围内未有明显破损脱落，结合强度最好；DLC/Cr/YG6膜系摩擦因数（0.09）小于DLC/Cr/SKD11膜系（0.14）和DLC/Cr/T7451膜系（0.32），说明其具有较好耐磨性能。由此看出，不同基体上制备的DLC薄膜结构不同，结合强度和耐磨性也有所差别。 |
| 关键词: 线性离子束 类金刚石 结合强度 耐磨性 |
| DOI：10.11933/j.issn.1007-9289.2015.06.007 |
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| Structure and Properties of DLC Films Prepared by Linear Ion Source Technology |
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ZHOU Tao, YUAN Juntang, HUANG Lei, WANG Zhenhua
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School of Mechanical Engineering, Nanjing University of Science and Technology
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| Abstract: |
| The Diamondlike carbon (DLC) films were deposited on YG6 cemented carbide, SKD11 stainless steel and T7451 aluminum alloy by linear ion source (LIS) technology to research structures and properties of DLC films on different substrates based on LIS. Cr was used as the transition layer to relieve the mismatch between films and substrates. Surface morphology and microstructure of the films were investigated by atomic force microscopy (AFM)，stylus profiler and Raman spectroscopy, respectively. Mechanical properties in terms of adhesive strength and wear resistance were tested by scratch tester and frictionwear tester. The results show that the DLC films made by LIS are smooth and uniform with a surface roughness Ra of 5.5 nm merely. The fact that the DLC/Cr/SKD11 film has the lowest ratio of ID/IG means highest amount of sp3C. The adhesive strength of the DLC/Cr/SKD11 film and the DLC/Cr/T7451 film are 42.2 N and 23.2 N, both weaker than that of the DLC/Cr/YG6 film without obvious failure in the range of 120 N. The friction coefficient of the DLC/Cr/YG6 is 0.09, lower than that of the DLC/Cr/SKD11 (0.14) and the DLC/Cr/T7451 (0.32). This means that the DLC/Cr/YG6 has a better wearresisting property. In conclusion, the DLC films deposited on different substrates have different microstructure, adhesive strength and wear resistance. |
| Key words: linear ion source(LIS) diamondlike carbon(DLC) adhesive strength wear resistance |
