引用本文: | 卓国海,柯培玲,李晓伟,汪爱英,赵运才.不同过渡层对DLC薄膜力学性能和摩擦学性能的影响[J].中国表面工程,2015,28(6):39~47 |
| ZHUO Guohai, KE Peiling, LI Xiaowei, WANG Aiying, ZHAO Yuncai.Influences of Different Interlayers on Mechanical and Tribological Properties of DLC Films[J].China Surface Engineering,2015,28(6):39~47 |
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摘要: |
薄膜与基体间的界面结合性能是决定薄膜性能发挥的关键要素。针对类金刚石薄膜(DLC)在硬质合金上结合力差的问题,采用线性阳极离子束复合磁控溅射技术在硬质合金YG8基体上设计制备了单层W过渡层、WC过渡层、双层W过渡层和三层W过渡层4种不同W过渡层的DLC薄膜,探讨了不同过渡层对DLC薄膜力学和摩擦学性能的影响。结果表明:不同过渡层结构的DLC薄膜结构致密,界面柱状生长随着层数增加及过渡层厚度的降低而打断,有利于改善薄膜的韧性。当为三层W过渡层时,DLC薄膜的断裂韧性达到最大值6.44 MPa·m1/2;与单层W过渡层相比,薄膜硬度有小幅下降,但薄膜内应力降低了55%,且膜/基匹配性更佳,结合强度高达85 N,此时薄膜具有较低的摩擦因数和磨损率,表现出比较优异的抗磨减摩性能。 |
关键词: 类金刚石 过渡层 力学性能 摩擦性能 |
DOI:10.11933/j.issn.1007-9289.2015.06.006 |
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Influences of Different Interlayers on Mechanical and Tribological Properties of DLC Films |
ZHUO Guohai, KE Peiling, LI Xiaowei, WANG Aiying, ZHAO Yuncai1,2
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1. Department of Mechanical Engineering, Jiangxi University of Science and Technology;2.Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences
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Abstract: |
Adhesion between the film and the substrate is a key factor to determine the performance of the films. Due to the low adhesion of diamondlike carbon (DLC) film on cemented carbide, the DLC films with different W interlayer (single W layer, single WC layer, W bilayer, and W trilayer) were deposited on cemented carbide YG8 substrate by a novel linear ion beam source composited with a DC magnetron sputtering process. The mechanical and tribological properties of DLC films were evaluated. The results show that the DLC films with different W interlayers are dense, and the interfacial columnar structure with the increased layers is interrupted, which is conducive to improve the toughness of DLC films. For the DLC film with W trilayer, its the biggest toughness is 6.44 MPa·m1/2. The hardness decreases, howerver, the residual stress can be reduced by 55% compared to the film with single W layer and the adhesion strength reaches to 85 N. Additionally, this film has lower friction coefficient and wear rate, which exhibits excellent antiwear and antifriction properties. |
Key words: diamond likecarbon (DLC) interlayer mechanical properties tribological performance |