引用本文: | 陈灵,刘正义,邱万奇,黄元盛.类金刚石膜的制备及其影响因素[J].中国表面工程,2002,(1):32~34 |
| .Preparation and Influencing Factors of Diamond-like Carbon Films[J].China Surface Engineering,2002,(1):32~34 |
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摘要: |
概述了近年来制类金刚石膜的新技术如双射频辉光放电(RF-RF)法,射频-直流辉光放电(RF-DC)法和微波-射频(MW-RF)法等,并且对影响类金刚石膜制备及性能的因素如基体材料,制备类金刚石膜时在膜中添加元素,类金刚石膜与基材之间的中间层等进行了较全面的分析。 |
关键词: 类金刚石镀 制备方法 影响因素 |
DOI: |
分类号:O484 |
基金项目:国家教委博士点基金资助项目,(1999056121) 广东省自然科学基金资助项目,(990548) |
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Preparation and Influencing Factors of Diamond-like Carbon Films |
CHEN Ling LIU Zheng-yi QIU Wan-qi HUANG Yuan-sheng
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Abstract: |
The new methods, such as RF-RF glow discharge plasma CVD, RF-DC glow discharge plasma CVD, MW-RF CVD etc. for producing diamond-like carbon films in recent years were reviewed. The influening factors, such as substrate materials, added chemical elements and intermediate layer, on diamond-like carbon films were also analyzed. |
Key words: diamond-like carbon films,preparation techniques,influencing factors |