引用本文:杨立军，张泽辉，党新安，李林.钢领表面电弧离子镀TiAlCN薄膜[J].中国表面工程,2013,26(2):51~55
YANG Li-jun, ZHANG Ze-hui, DANG Xin-an, LI Lin.TiAlCN Coatings Deposited by Arc Ion Plating on the Surface of Rings[J].China Surface Engineering,2013,26(2):51~55
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钢领表面电弧离子镀TiAlCN薄膜
杨立军，张泽辉，党新安，李林1,2
1. 陕西科技大学 机电工程学院, 西安 710021;2. 咸阳恒信纺机器材有限公司, 陕西 咸阳 712000
摘要:
在低温（145 ℃）条件下，采用真空电弧离子镀技术在GCr15钢领表面制备TiAlCN薄膜。利用扫描电子显微镜（SEM）、电子探针（EPMA）、X射线衍射仪（XRD）、附着力测试仪和显微硬度计分析测试薄膜形貌和性质。结果表明，负偏压较小，液滴尺寸大；负偏压过高，液滴脱落后留下很多凹坑，薄膜组织性能恶化。随着弧电流的增大，液滴发生细化。当弧电流为50 A、负偏压为-100 V和镀膜时间为50 min时，薄膜的均匀性和致密性好，薄膜表面的液滴分布均匀且尺寸小，液滴最大尺寸小于2 μm，膜层平均厚度为2.2 μm，膜层中有Fe0.975Ti0.025(110)、Ti2N(112)和AlTi3(CN)0.6等多种物质的存在，改善了膜层的组织结构，薄膜的附着力达到最大值39.8 N，薄膜的硬度达到最大值1 776 HV0.01，显著提高了钢领的表面硬度。
关键词:  真空电弧离子镀  TiAlCN  硬度  附着力
DOI：
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基金项目:陕西省教育厅产业化中试项目（2011TG24）
TiAlCN Coatings Deposited by Arc Ion Plating on the Surface of Rings
YANG Li-jun, ZHANG Ze-hui, DANG Xin-an, LI Lin1,2
1. College of Mechanical and Electrical Engineering, Shanxi University of Science and Technology, Xi’an 710021;2. Xianyang HengXin Textile Machinery Co., Ltd., Xianyang 712000, Shanxi
Abstract:
The composite TiAlCN coatings were deposited by vacuum arc ion plating on GCr15 rings at low temperature(145 ℃). The morphology and characterstics of the coating were analyzed by SEM, EPMA, XRD, adhesion tester, and microhardness tester. The result show that when the negative bias is small, the droplet size is big, and the negative bias is high, many dents are left after the droplets falling off, and the microstructure and properties of the coating deteriorate. The droplets refined with increasing arc current. When the current is 50 A, the negative bias is -100 V, and the deposition time is 50 min, the uniformity and compactness of coating is good, the macroparticles on the coating are uniform and small, the biggest droplet size is less than 2 μm, and the average thickness of the coating is 2.2 μm. The microstructure of the coating is improved because of the existence of Fe0.975Ti0.025 (110), Ti2N (112) and AlTi3 (CN) 0.6. The adhesion is up to the maximum 39.8 N, and the hardness of the coating reaches a maximum of 1 776 HV0.01, which significantly increases the surface hardness of the ring.
Key words:  vacuum arc ion plating  TiAlCN coating  micro-hardness  adhesion
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