| 摘要: |
| 为提高类金刚石涂层与奥氏体不锈钢之间的结合强度，利用等离子体增强化学气相沉积技术分别在未处理和氮化处理的AISI 316L表面沉积类金刚石（DLC）涂层，研究不同沉积温度下DLC及氮化复合DLC涂层的相结构与摩擦学性能。采用X射线衍射仪（XRD）、拉曼光谱仪（Raman）表征涂层的相结构；采用扫描电子显微镜（SEM）观察截面形貌，并用EDS测量氮、碳元素的深度分布；采用纳米压痕仪、摩擦磨损试验机、超景深显微镜、划痕仪检测DLC涂层的摩擦学性能。结果表明：氮化复合DLC涂层的结合力和耐磨性优于DLC涂层；其中100 ℃时，硬度和结合力分别提高25%和175%，综合性能最好。沉积DLC涂层的过程中，氮化层中氮原子因扩散而重新分布，使氮化层的厚度增加，硬度梯度减缓，更有利于基体与DLC涂层间的过渡。 |
| 关键词: DLC涂层 扩展奥氏体 相结构 摩擦学性能 膜基结合强度 |
| DOI：10.11933/j.issn.1007-9289.20190316001 |
| 分类号:TG174.44 |
| 基金项目:国家自然科学基金（51502126）；辽宁科技大学省级重点实验室中心开放课题（USTLKFSY201705）；辽宁科技大学青年基金（2018QN12） |
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| Phase Structure and Tribological Properties of DLC Coatings Combined with Nitriding on Surface of AISI 316L |
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HUANG Zhen, GUO Yuanyuan, TENG Yue, YANG Li, YANG Yongjie, WU Fayu
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Surface Engineering Institute, University of Science and Technology Liaoning, Anshan 114051, China
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| Abstract: |
| In order to improve the adhesion strength between diamond-like carbon (DLC) coatings and the austenitic stainless steels, DLC coatings were prepared on the surface of untreated and nitridied AISI 316L at different deposition temperatures by plasma-enhanced chemical vapor deposition (PECVD) technology. Phase structure and tribological properties of the coating were investigated. X-ray diffraction (XRD) and Raman spectroscopy were used to characterize the phase structure of the coatings. The cross-sectional morphology was observed by scanning electron microscope (SEM), and the depth distribution of nitrogen and carbon elements was measured by EDS. Nano-indentation instrument, friction and wear tester, 3D optical microscope and scratch tester were used to evaluate the tribological properties of DLC coatings. The results show that the adhesion strength and wear resistance of DLC coatings combined with nitriding are higher than that of the single DLC coatings. Deposited at 100 ℃, accompanied by the best modification, the hardness and adhesion strength increases by 25% and 175%, respectively, and the comprehensive performance is the best. During the deposition of DLC coatings, the nitrogen atoms in the nitrided layer are re-distributed due to the diffusion, increasing the thickness of the nitrided layer and decreasing the gradient of hardness, which contributes to a better transition between the substrate and the DLC coatings. |
| Key words: DLC coatings expanded austenite phase structure tribological properties adhesion strength |
