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自配对含氢类石墨碳薄膜超滑性能
欧玉静1,2, 王永富2, 岳照凡1,2, 张俊彦1,2
1.兰州理工大学 石油化工学院, 兰州 730050;2.中国科学院兰州化学物理研究所 固体润滑国家重点实验室, 兰州 730000
摘要:
采用等离子体增强化学气相沉积与原位渗氮复合技术在硅片和轴承钢球上制备了类石墨碳薄膜,将两者组成摩擦配伍对,并讨论自配对类石墨薄膜在氮气中摩擦学行为。利用往复摩擦机、扫描电子显微镜、三维表面轮廓仪考察自配对类石墨碳薄膜在不同载荷下摩擦磨损性能;采用高分辨透射电镜、拉曼光谱和红外吸收谱分析类石墨碳薄膜摩擦前后结构变化。摩擦测试结果表明:在载荷4 N时,薄膜摩擦因数为0.01;在8 N时,薄膜摩擦因数降低到0.005。这种变化归因于摩擦诱导薄膜结构进一步有序化以及沿滑动方向形成更加有序且更长石墨烯以及片状磨屑。证实了采用自配对碳薄膜方案是实现固体超滑一种有效途径。
关键词:  超滑  摩擦磨损  类石墨  类金刚石  碳薄膜
DOI:10.11933/j.issn.1007-9289.20181008004
分类号:TG174.44
基金项目:国家自然科学基金(中国-瑞士:51611530704)
Superlubric Properties of Self-mated Hydrogenated Graphite-like Carbon Films
OU Yujing1,2, WANG Yongfu2, YUE Zhaofan1,2, ZHANG Junyan1,2
1.School of Petrochemical Technology, Lanzhou University of Technology, Lanzhou 730050, China;2.State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China
Abstract:
Hydrogenated graphite-like carbon (GLC) films on Si flakes and steel balls were prepared by the combination of plasma enhanced chemical vapor deposition and in-situ plasma nitriding. Frictional behaviors in N2 gas for the friction couples composed of the steel ball-films and Si substrate-ones were discussed. The friction and wear properties with increasing loads of self-mated GLC films were investigated by reciprocating ball-on-disc tribotester, scanning electron microscopy and 3D surface profilometry. The microstructure changes for the films before and after friction were revealed by TEM, Raman and Reflection FTIR. The results show that the friction coefficient decreases from 0.01 to 0.005 when the load is 4 N and 8 N, respectively. This is because the friction can induce the film structure more orderly, and generate more orderly and longer graphene and subsequent flake-like wear debris along the lubricating direction. The self-mated method for hydrogenated GLC films is an effective way to attain superluricity.
Key words:  superluricity  friction and wear  graphite-like  DLC  carbon film