| 摘要: |
| 利用反应磁控溅射法制备W2N和WSiN涂层，利用XRD，SEM和AFM研究涂层的显微结构，利用纳米压痕仪测试涂层的力学性能，利用摩擦磨损仪表征涂层的摩擦磨损行为。结果表明，原子数分数2.4% Si掺杂没有引起W2N涂层相结构和力学性能的明显变化，但降低了涂层的表面粗糙度（从10.56 nm到8.35 nm）。不锈钢基底、W2N涂层、WSiN涂层与Al2O3对偶球的摩擦因数分别为0.62、0.42和0.35，对应的磨损率分别为4.2×10-14、3.8×10-16和3×10-16 m3/N·m。不锈钢基底、W2N涂层、WSiN涂层与GCr15对偶球的摩擦因数分别为0.56、0.47和0.49，对应的磨损率分别为5.9×10-15、2.8×10-16和3.2×10-16 m3/N·m。在上述两种对偶球情况下，W2N涂层、WSiN涂层均能够降低不锈钢的摩擦因数10%~40%和磨损率1~2个量级。W2N涂层和WSiN涂层具有较好的润滑抗磨性，能给不锈钢基底提供防护作用，且WSiN涂层的防护效果更佳。 |
| 关键词: WSiN涂层 磁控溅射 摩擦学行为 |
| DOI：10.11933/j.issn.1007-9289.20180503005 |
| 分类号:TG174.444;TG115.58 |
| 基金项目:国家自然科学基金（61274128）；重庆市自然科学基金（CSTC2013JCYJA0731） |
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| Structure and Tribological Behavior of WSiN Coatings with Low Content of Si |
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LI Ke1,2, SHAO Tao2, GE Fangfang2, HUANG Feng2, FENG Qing1
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1.College of Physics and Electronic Engineering, Chongqing Normal University, Chongqing 401331, China;2.Key Laboratory of Marine Materials and Related Technologies, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, China
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| Abstract: |
| W2N coating and WSiN coating (with 2.4% Si) were prepared by magnetron sputtering. Microstructure of the coatings was investigated by XRD, SEM, and AFM. Mechanical properties of the coatings were measured by nanoindentation. The tribological behavior of the coatings was evaluated by pin-on-disk tribo-tests. The results show that the two coatings have similar phase structures and mechanical properties, however, the WSiN coating have a smoother surface, with the average surface roughness of about 8.35 nm, lower than that of the W2N coating (about 10.56 nm). During the tribo-tests against the Al2O3 counterpart, the friction coefficients of the stainless steel substrate, the W2N coating, and the WSiN coating are 0.62, 0.42, and 0.35, respectively. The corresponding wear rates are 4.2×10-14 m3/N·m, 3.8×10-16 m3/N·m, and 3×10-16 m3/N·m, respectively. During the tribo-tests against the GCr15 counterpart, the friction coefficients of the stainless steel substrate, the W2N, and the WSiN coating are 0.56, 0.47, and 0.49, respectively. The corresponding wear rates are 5.9×10-15 m3/N·m, 2.8×10-16 m3/N·m, and 3.2×10-16 m3/N·m, respectively. The friction coefficients of the substrate decrease by 10%-40%, and the wear rates of the substrate decrease by 1-2 orders of magnitude. With the lubrication effect and the high wear resistance, the W2N coating and the WSiN coating can provide the protection for the stainless steel substrate. Furthermore, the protective capability of the WSiN coating is relatively higher than that of the W2N coating. |
| Key words: WSiN coatings magnetron sputtering tribological behavior |
