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| Cr基过渡层对钛合金表面类金刚石薄膜摩擦学性能的影响 |
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王军军1,2, 何浩然1, 黄伟九1,2,3, 王林青4, 陈环谷1, 王汝强1, 王佳1
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1.重庆理工大学 材料科学与工程学院, 重庆 400054;2.重庆市制动摩擦材料协同创新中心, 重庆 400054;3.重庆理工大学 重庆市高校模具技术重点实验室, 重庆 400054;4.重庆理工大学 理学院, 重庆 400054
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| 摘要: |
| 采用磁控溅射技术在钛合金（Ti6Al4V）表面制备Cr、Cr/CrN和Cr/CrN/CrNC过渡层结构的类金刚石（DLC）薄膜。采用扫描电子显微镜、拉曼光谱仪与原子力显微镜分析薄膜的结构和表面形貌，利用纳米压痕仪、薄膜内应力测试仪、划痕测试仪、摩擦试验机和二维轮廓仪研究薄膜的硬度、内应力、结合力和摩擦磨损性能。结果表明：随着Cr基梯度过渡层的引入，DLC薄膜的内应力逐渐下降，结合力逐渐上升。Cr/CrN/CrNC/DLC薄膜具有优异减摩抗磨性能，摩擦因数和磨损率低至0.09±0.02和（1.89±0.15）×10-7 mm3/N·m。试验结果对钛合金表面高性能DLC薄膜制备及应用具有一定的参考价值和指导意义。 |
| 关键词: 类金刚石薄膜 梯度过渡层 结合力 摩擦性能 |
| DOI：10.11933/j.issn.1007-9289.20180108003 |
| 分类号:TG174.444;TG115.58 |
| 基金项目:国家自然科学基金（51505050）；重庆市教委科学技术研究基础/应用基础研究项目（KJ1500942）；重庆市科委基础与前沿研究一般项目（cstc2017jcyjAX0075） |
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| Effects of Cr-based Interlayers on Tribological Property of Diamond-like Carbon Films on Titanium Alloy |
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WANG Jun-jun1,2, HE Hao-ran1, HUANG Wei-jiu1,2,3, WANG Lin-qing4, CHEN Huan-gu1, WANG Ru-qiang1, WANG Jia1
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1.College of Materials Science and Engineering, Chongqing University of Technology, Chongqing 400054;2.Chongqing Collaborative Innovation Center for Brake Tribological Matrials, Chongqing 400054;3.Chongqing Municipal Key Laboratory of Institutions of Higher Education for Mould Technology, Chongqing University of Technology, Chongqing 400054;4.School of Science, Chongqing University of Technology, Chongqing 400054
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| Abstract: |
| DLC films with three different interlayers (Cr/DLC, Cr/CrN/DLC and Cr/CrN/CrNC/DLC) were deposited on titanium alloys (Ti6Al4V) using magnetron sputtering. The structure and surface morphology of the film were analyzed by using scanning electron microscopy(SEM), Raman spectroscopy and atomic force microscopy. The hardness, residual stress, adhesive force, tribological and wear properties were evaluated by using the nano-indenter, film stress tester, scratch tester, frictional machine and 2D profilometer, respectively. The results show that the residual stress decreases and adhesive force increases gradually when the Cr gradient transitional layer is introduced. The Cr/CrN/CrNC/DLC film exhibits excellent anti-wear and anti-friction properties with lowest friction coefficient (0.09±0.02) and wear rate (1.89±0.15)×10-7 mm3/N·m. The results have certain reference value and significance for the preparation and application of high-performance DLC film on titanium alloy. |
| Key words: diamond-like carbon films (DLC) gradient transitional layer adhesive force tribological performance |