| 摘要: |
| 由于真空度的要求，制备氮化物涂层时将不可避免的会有氧的存在，因此了解氧元素对涂层性能的影响至关重要。采用高功率脉冲磁控溅射（HIPIMS）技术在Ar/N2/O2混合气氛下制备AlCrSiON涂层，研究氧含量（0%~30.4%，原子数分数）对涂层结构、力学性能和摩擦学性能的影响及作用机制。结果表明，AlCrSiN涂层由fcc-CrN、β-Cr2N和hcp-AlN组成，AlCrSiON则由（Cr， Al）N、立方Cr2N和（Cr， Al）（O， N）组成。AlCrSiN涂层硬度为（14.3±1.8） GPa，随着氧含量增加至24.3%，涂层硬度增加至（20.1±3.0） GPa；继续增加氧含量则将导致涂层硬度下降。当环境温度由室温增加至400℃，涂层摩擦因数由0.6~0.7增加至0.9；温度升至800℃，涂层摩擦因数降至0.4。氧含量对涂层高温摩擦因数的影响较小，对涂层的磨损率却有着重要影响。当氧含量为30.4%时，AlCrSiON涂层具有最优耐磨损性能。 |
| 关键词: AlCrSiON涂层 高功率脉冲磁控溅射 力学性能 摩擦学性能 |
| DOI：10.11933/j.issn.1007-9289.20171031001 |
| 分类号:TG174.444;TG115.58 |
| 基金项目:国家自然科学基金（51522502）；中国博士后科学基金（2016M600641）；广东省自然科学基金（2014A030311002，2016A050502056） |
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| Effects of Oxygen Content on High-temperature Tribological Behaviors of AlCrSiON Coatings Deposited by High Power Impulse Magnetron Sputtering |
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TANG Peng, LI Hai-xu, WU Zheng-tao, DAI Wei, WANG Qi-min
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School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou 510006
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| Abstract: |
| Due to the requirement of vacuum degree, the presence of oxygen is inevitable when preparing the nitride coating, therefore, it is very important to understand the influence of oxygen element on the coating performance. AlCrSiON thin films were deposited by high power impulse magnetron sputtering (HIPIMS) in an Ar/N2/O2 mixture atmosphere. The influence of varous oxygen amounts (0%–30.4%) on the microstructure, mechanical properties and tribological behaviors of the AlCrSiON films was investigated. The results indicate that the oxygen-free AlCrSiN film is consist of fcc-CrN, β-Cr2N and hcp-AlN. The AlCrSiON films have the solid-solution of (Cr, Al)N, c-Cr2N and (Cr, Al)(O, N) phases. The hardness firstly increases from (14.3±1.8) GPa for the AlCrSiN film to a maximum value of (20.1±3.0) GPa for the coating with the oxygen content of 24.3% and then decreases for larger oxygen contents. The average friction coefficients of the coatings firstly increase from 0.6-0.7 at RT to 0.9 at 400℃, and then decrease to 0.4 at 800℃. Varying the oxygen contents produces a slight impact on the friction coefficient of the coating. However, improving the oxygen content has significant impact on the wear rate. The AlCrSiON coating with 30.4% oxygen possesses the best wear resistance. |
| Key words: AlCrSiON coatings high power impulse magnetron sputtering mechanical properties tribological behavior |
