| 摘要: |
| 利用等离子体浸没离子注入与沉积设备，在7A04铝合金表面制备类金刚石薄膜，使其表面有较高的硬度和良好的耐磨损性能。分别采用拉曼光谱仪、显微硬度计、纳米划痕仪和摩擦磨损试验机对样品的微观结构、显微硬度、膜基结合力和摩擦磨损性能进行测试。研究了气体压强对薄膜微观结构、显微硬度及摩擦磨损性能的影响。结果表明：在气压为0.2 Pa下制备的薄膜与基体结合力达到了26 mN，具有良好的耐磨损性能；随着气压的升高，薄膜厚度增加，膜基结合力与耐磨损性能下降。 |
| 关键词: 类金刚石薄膜 铝合金 气体压强 磨损 |
| DOI：10.3969/j.issn.1007-9289.2013.05.006 |
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| Effects of Gas Pressure on Microstructure and Properties of Diamondlike Carbon Films |
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SU Yongyao, ZHAO Lining, WANG Jinbiao, TU Mingjing, LI Xueyuan, YANG Wenmao1,2
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1.Materials Science Interdisciplinary Research Center, Chongqing University of Arts and Sciences, Chongqing 402160;2.Institute of Mechanical Manufacturing Technology, China Academy of Engineering Physics, Mianyang 621900, Sichuan
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| Abstract: |
| Diamondlike carbon (DLC) films were deposited on 7A04 aluminium alloy by plasma immersion ion implantation and deposition (PIII&D) to enhance the microhardness and wear resistance. The microstructure, microhardness, adhesion property and tribological property of the samples were measured by Raman spectra, microhardness meter, nanoscratch tests and ballondisk wear test, respectively. The effects of gas pressure on microstructure, microhardness and wear resistance were studied. The results show that the films synthesized at 0.2 Pa has the best wear resistance, and the critical load up to 26 mN. The thickness increases with increasing gas pressure, but the wear resistance and the adhesion decrease. |
| Key words: diamondlike carbon (DLC)films aluminium alloy gas pressure wear |
