| 摘要: |
| 利用等离子体增强化学气相沉积技术(PECVD)在单晶硅(100)表面上制备了一层含有六方金刚石结构的碳氢薄膜。采用透射电子显微镜和拉曼光谱仪对薄膜结构进行表征；并用Nano-indenterⅡ型纳米压痕仪和CSM—摩擦磨损试验机对薄膜的力学性能和摩擦学性能进行了测试。结果表明：该碳氢薄膜含有六方金刚石结构，另外还含有少量的纳米弯曲石墨片段；与制备的类金刚石碳氢薄膜相比，该薄膜具有较好的力学性能，同时该薄膜在空气环境下表现出了较好的摩擦学性能。 |
| 关键词: 等离子增强化学气相沉积 碳氢薄膜 六方金刚石 摩擦性能 |
| DOI： |
| 分类号: |
| 基金项目:国家自然科学基金（51275508）； 国家重点基础研究发展计划(973计划)（2013CB632300） |
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| Preparation of Hydrogenated Carbon Film with Hexagonal Diamond Structure by PECVD |
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CAO Zhong-yue, ZHANG Bin, WEI Li, ZHANG Jun-yan1,2
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1. State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000;2.College of Chemistry and Chemical Engineering, University of Chinese Academy of Sciences, Beijing 100049
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| Abstract: |
| The hydrogenated carbon film with hexagonal diamond structure was deposited on n-type Si (100) substrate by plasma enhanced chemical vapor deposition (PECVD). The microstructure of the film was investigated by high-resolution transmission electron microscopy (HRTEM) and Raman spectrum. The mechanical properties and tribological behaviors were tested by nano-indenter and CSM-tribometer. The experimental results show that the film has a hexagonal diamond structure, also contains a small amount of nano-graphite fragments; compared with the diamondlike carbon film, this film shows better mechanical properties and more excellent tribological properties in air. |
| Key words: plasma enhanced chemical vapor deposition (PECVD) carbon film hexagonal diamond tribology |
