| 摘要: |
| 采用离子束增强磁控溅射沉积技术制备了Ti–Mo金属多层膜和TiMo合金膜，评价了膜层的结合强度、韧性、硬度等力学性能和摩擦学性能。结果表明：不同调制周期及不同调制比的Ti–Mo多层膜的硬度均比Ti、Mo金属单层膜的硬度高，调制周期小于200 nm的多层膜呈现出明显的超硬度现象，调制周期为20 nm的多层膜硬度达到最大值，多层膜硬度随Ti膜:Mo膜调制比的减小而提高。Mo过渡层比Ti过渡层更能有效改善膜层的结合强度，离子辅助轰击能明显提高膜层的结合力。TiMo合金膜的硬度与Mo金属单层膜相近，明显低于调制周期20～200 nm的Ti–Mo多层膜，其韧性也明显低于调制周期60 nm以上的Ti–Mo多层膜。调制周期20～200 nm的Ti–Mo多层膜的耐磨性能优于TiMo合金膜。 |
| 关键词: Ti–Mo多层膜 TiMo合金膜 硬度 磨损 腐蚀磨损 |
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| 基金项目:国家自然科学基金（50671085,50771070）；国家863高技术研究发展计划（2007AA03Z521） |
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| TiMo Alloy Film and Ti–Mo Multilayer Films Prepared by Ion–beam Enhanced Deposition |
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TANG Chang–bin1,2, LIUDao–xin1, LI Fan–qiao1, ZHANG qing1, ZHANG Xiao–hua11,2
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1. Corrosion and Protection Research Lab, Northwestern Polytechnical University, Xi′an 710072;2. School of Metallurgical Engineering, Xi′an University of Architecture and Technology, Xi′an 710055
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| Abstract: |
| Ti–Mo metallic multilayers and TiMo alloy film were prepared by ion beam enhanced magnetron sputtering deposition, and some mechanical properties of films such as bonding strength，toughness, hardness and tribological performance were evaluated. These results show that the hardness of all Ti–Mo multilayer films of different periodicity and modulation ratio becomes harder than the surface hardness of Ti pure film or Mo pure film. When periodicity of the multilayer films is low from 200 nm, a distinct super–hardness effect occurs, while, the surface hardness of multilayer films with periodicity 20 nm is highest among these Ti–Mo metallic multilayers, and the surface hardness of multilayer films is increased with reducing the periodicity of the films or increasing the modulation ratio of Ti film/Mo film. The bonding strength can be improved more efficiently by Mo transition layer than Ti transition layer, and the ion assistance can improve the films bonding strength obviously. The hardness of TiMo alloy film is close to that of pure Mo film, however, its hardness is lower evidently than that of Ti–Mo multilayers with periodicity 20～200 nm, and its toughness is also poorer than that of multilayers with periodicity in excess of 60 nm. The Ti–Mo metallic multilayers with periodicity 20～200 nm indicate a better tribological performance than TiMo alloy films. |
| Key words: Ti–Mo multilayer film TiMo alloy film hardness wear corrosive wear |
