摘要: |
文中利用非平衡磁控溅射技术在Ti6Al4V合金表面沉积TiN薄膜。固定冲击频率、改变冲击载荷,在小载荷冲击磨损试验机上进行了系列周次的冲击磨损试验,用台阶仪、扫描电子显微镜、X射线衍射仪分析磨痕深度、形貌及相结构,并探讨了TiN薄膜的磨损机理。试验表明:TiN薄膜的冲击磨损机理主要为塑性变形和疲劳剥落,与基体材料作比较,TiN薄膜破坏的临界冲击周次比基体材料Ti6Al4V合金明显提高。 |
关键词: TiN薄膜 Ti6Al4V合金 冲击磨损性能 磨损机理 |
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基金项目:国家自然科学创新研究群体科学基金资助(50821063);国家973计划(2007CB714704) |
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Impact Wear Performance of TiN Film Grown on Ti Alloys by Unbalanced Magnetron Sputtering |
WANG Yan1,2 , ZHOU Zhong–rong11,2
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1.Tribology Research Institute, Southwest Jiaotong University, Chengdu 610031;2.College of Material Science and Engineering, Xihua University, Chengdu 610039
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Abstract: |
TiN films were grown by unbalanced magnetron sputtering on Ti6Al4V. The impact wear tests of TiN films were carried out with a small load impact–wear testing machine by fixed–frequency and different impact–force. The depth, morphologies and phase structure of worn surface were characterized with surface profilometer, scanning electron microscope(SEM), X–ray diffraction (XRD), and the wear mechanism of the TiN films was discussed in detail. The results indicate the wear mechanism of the TiN films were plastic deformation and fatigue flake. As compared with the Ti6Al4V, TiN films have higher critical impact number. |
Key words: TiN film Ti6Al4V alloy impact–wear performance wear mechanism |