| 摘要: |
| 采用等离子体浸没离子注入与沉积(PIIID)技术在GCr15轴承钢表面制备了TiN、TiC薄膜，并对其进行了显微硬度和摩擦磨损测量。结果发现：注入时间、注入脉宽和工作气体对GCr15轴承钢表面改性效果具有显著的影响。通过对比分析，获取了最佳处理工艺参数。 |
| 关键词: 表面改性 等离子体浸没离子注入与沉积 显微硬度 摩擦磨损性能 |
| DOI： |
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| Study on Surface Modification of GCr15 Bearing Steel by Plasma Immersion Ion Implantation and Deposition |
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SUN Tao, TANG Bao-yin, WANG Lang-ping, WANG Xiao-feng, YU Yong-hao
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Harbin Institute of Technology, State key Laboratory of Advanced Welding Production & technology, Harbin, 150001 China
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| Abstract: |
| In this paper, TiN and TiC thin films were synthesized on GCr15 bearing steel substrates by plasma immersion ion implantation and deposition(PIIID). After PIIID treatments, the as-deposited samples were evaluated by the microhardness and tribological tests. The results show that the processing time, the pulse duration and the working gas can greatly effect the mechanical properties of the samples. Consequently, according to the results of microhardness and wear tests, the best parameters of PIIID process for enhancing the surface properties of GCr15 steel can be obtained. |
| Key words: surface modification plasma Immersion ion implantation and deposition (PIIID) microhardness wearability |
