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| 摘要: |
| 本文升绍了一种改善氨化铝(AIN)陶瓷与金属连接性的新工艺方法。首先采用射频溅射在AIN陶瓷表面沉积铝、钛薄膜，然后用真空钎焊和扩散焊实现经表面改性的AIN陶瓷与Cu和FeNi42等金属的连接。由于射频溅射于射频溅射的Al、Ti薄膜改善了AIN陶瓷与金属的润湿性，所以AIN／金属的结合强度咐显提高。通过对结台界面的显微形貌站构分析咀及接头应力计算，阐明了采用功能梯度材料(FGM)过渡层可以进一步改善AIN／金属的连接性。 |
| 关键词: 金属 扩散焊 真空钎焊 表面沉积 过渡层 射频溅射 结合强度 AIN陶瓷 氮化铝陶瓷 新工艺 |
| DOI： |
| 分类号:TG174 TQ174 |
| 基金项目: |
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| Joining AIN Ceramic to Metals with R.F. Sputtering Film |
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Zhu Sheng W.Wladyslaw Xu Binshi
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| Abstract: |
| A method was developed to improve the joining of aluminum nitride (AlN) ceramic and metals.The surface of AlN ceramic was first sputtered by radio frequency (R.F.) with aluminum or titanium film. And then brazing with AgCu19.5Ti3In5 filler as well as diffusion bonding processes were investigated to join the different surface modified AlN ceramics to Cu and FeNi42 metals. The strength of the joints was improved because the interfacial sputtering film improved the wettability of AlN. Based on the results of the microstructure and chemical interactions studies and residual stresses calculations, it is believed that the joining ability of AlN ceramic to metals can be improved further with a functionally gradient material (FGM) interlayer. |
| Key words: R.F. sputtering, AIN ceramic/metal joining,Vacuum brazing, Diffusion bonding, Functionally gradient material (FGM), |
