| 引用本文: | 高凯晨,刘仕远,巩春志,田修波.细长管内表面镀Cu过程中的空心阴极辉光电[J].中国表面工程,2022,35(5):264~271 |
| GAO Kaichen,LIU Shiyuan,GONG Chunzhi,TIAN Xiubo.Glow Discharge of Hollow Cathode During Cu Plating on Thin Tube Surface[J].China Surface Engineering,2022,35(5):264~271 |
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| 摘要: |
| 为了在细长管内壁获得质地均匀的 Cu 膜层，采用射频耦合直流空心阴极放电的方法，研究在长度 200 mm、内径 6~ 12 mm 的细长管内沉积 Cu 薄膜时的放电情况。通过探究改变耦合直流电压、射频电压、中频电压以及管内径和测量管内轴向不同位置带来的放电影响情况，获得最佳的放电参数。研究发现，耦合直流电压越高、射频功率越高，则放电过程中的 Ar*、Ar+ 、Cu+ 活性粒子数量越多；增大中频电压，Ar*和 Cu+ 光谱峰值强度呈现“V”字形，即先降低后升高，Ar+ 光谱峰值强度在 0~40 V 时处于稳定的状态，在 40 V 开始上升，并且在 60 V 之后快速上升；管内径 10 mm 时放电效果最佳，在内径为 6 mm 到 10 mm 的管内 Ar*、Ar+ 、Cu+ 粒子数目增多，当内径到达 12 mm，三种活性粒子迅速减少。通过对 200 mm 长、 10 mm 内径管内不同轴向位置的测量，发现细长管中部(100 mm)放电强度高于管口(10 mm)和管尾(190 mm)。 |
| 关键词: 细长管空心阴极 耦合直流电压 射频电压 中频电压 管内径 |
| DOI：10.11933/j.issn.1007?9289.20210929001 |
| 分类号:TG156;TB114 |
| 基金项目: |
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| Glow Discharge of Hollow Cathode During Cu Plating on Thin Tube Surface |
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GAO Kaichen, LIU Shiyuan, GONG Chunzhi, TIAN Xiubo
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College of Materials Science and Engineering, Harbin Institute of Technology University,Harbin 150001 , China
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| Abstract: |
| In order to obtain uniform Cu film in the inner wall of a slender tube, the discharge of Cu film deposited in a 200 mm long tube with an inner diameter of 6~12 mm is studied by using Radio Frequency (RF) coupled Direct Current(DC)hollow cathode discharge. The best discharge parameters are obtained by exploring the influence of changing coupling DC voltage, RF voltage, Intermediate frequency (IF) voltage, tube diameter and measuring tube axial position. According to the experiment, the higher the coupling DC voltage and rf power, the more Ar*, Ar+ , Cu+ active particles in the discharge process. With the increase of intermediate frequency voltage, the peak intensity of Ar* and Cu+ spectra shows a "V" shape, that is, it decreases first and then increases. Ar+ spectra are in a stable state from 0 to 40 V, and begin to rise at 40 V, and rise rapidly after 60 V. When the inner diameter of the tube is 10 mm, the discharge effect is the best, the number of Ar*, Ar+ , Cu+ particles increases in the tube from 6 mm to 10 mm, and the three active particles decrease rapidly when the inner diameter reaches 12 mm. It is found that the discharge intensity in the middle of the slender tube (100 mm) is higher than that at the mouth (10 mm) and the tail (190 mm). |
| Key words: hollow cathode of slender tube coupled direct current voltage radio frequency voltage intermediate frequency voltage tube diameter |
