| 引用本文: | 贾昆鹏,王雪,徐锋,施莉莉,赵延超,左敦稳.调制比对HiPIMS制备多层DLC薄膜耐腐蚀性能的影响∗[J].中国表面工程,2021,34(2):35~40 |
| Jia Kunpeng,Wang Xue,Xu Feng,Shi Lili,Zhao Yanchao,Zuo Dunwen.Effects of Modulation Ratio on Corrosion Resistance of Multilayer DLC Films Prepared by HiPIMS[J].China Surface Engineering,2021,34(2):35~40 |
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| 摘要: |
| 为获得具备优异耐腐蚀性能的类金刚石(DLC) 涂层,采用高功率脉冲磁控溅射技术( HiPIMS) 在硅片表面制备软 (低 sp3 含量)硬(高 sp3 含量)交替多层类金刚石薄膜,探究调制比对薄膜耐腐蚀性能的影响。 采用 XPS、四探针电阻仪、轮廓仪对薄膜成分、电阻率、残余应力进行检测分析,通过电化学测试获得多层 DLC 薄膜的极化曲线。 结果表明:相较于低衬底偏压(-25 V)下沉积的纯软 DLC 薄膜,高衬底偏压(-75 V) 下沉积的纯硬 DLC 薄膜 sp3 含量明显升高;纯软薄膜电阻率为 100. 53 kΩ·cm,纯硬 DLC 薄膜电阻率高达 1 585. 21 kΩ·cm,电阻率随着硬膜厚度的增加而增加;薄膜中残余应力随着调制比 (软 ∶硬)的减小而上升,纯硬 DLC 薄膜残余应力为 0. 943 GPa,而纯软薄膜残余应力仅为 0. 095 GPa。 电化学试验结果显示, 调制比为 1 ∶2的多层 DLC 薄膜自腐蚀电位为-0. 014 V,自腐蚀电流密度为 36. 6 nA/ cm2 ,具有相对最佳的耐腐蚀性能。 |
| 关键词: DLC 薄膜 软硬交替 调制比 电阻率 残余应力 耐腐蚀性 |
| DOI：10.11933/j.issn.1007-9289.20210108001 |
| 分类号:TG174 |
| 基金项目:国家自然科学基金(51575269)、国家自然科学基金联合基金(U20A20293)和研究生创新基地开放基金立项(kfjj20190509)资助项目 |
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| Effects of Modulation Ratio on Corrosion Resistance of Multilayer DLC Films Prepared by HiPIMS |
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Jia Kunpeng, Wang Xue, Xu Feng, Shi Lili, Zhao Yanchao, Zuo Dunwen
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College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing 210016 , China
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| Abstract: |
| In order to obtain diamond-like carbon (DLC) coatings with excellent corrosion resistance, soft (low sp3 content) and hard (high sp3 content) alternating multilayer DLC films were prepared on silicon wafers by high power pulsed magnetron sputtering (HiP- IMS), and the influence of modulation ratio on the corrosion resistance of the films was investigated. X-ray photoelectron spectroscopy (XPS), four-probe resistance meter and surface profilometer were used to test composition, resistivity and residual stress of films. The polarization curve of the multi-layer DLC film were obtained through electrochemical experiment tests to study the effects of modulation ratio on the corrosion resistance of the films. Results show that compared with the low bias voltage(-25 V), the sp3 content of the DLC film deposited under high bias voltage(-75 V) is significantly increased. The resistivity of pure soft film is 100. 53 kΩ·cm, and the resistivity of pure hard DLC film was as high as 1 585. 21 kΩ·cm, the resistivity increased with the increase of the hard film thickness. The residual stress in the film increased with the modulation ratio ( soft ∶ hard) decreased. Electrochemical experimental results show that the self-corrosion potential of the multilayer DLC film with a modulation ratio of 1 ∶2 is -0. 014 V, the self-corrosion current density is 36. 6 nA/ cm2 , and the multilayer DLC film has relatively optimal corrosion resistance. Results show that the alternating hard and soft multilayer structure can effectively reduce the residual stress in DLC films, the DLC films with excellent corrosion resistance can be obtained by reasonably adjusting the multilayer structure of films and the sp3 content in the films. |
| Key words: DLC film soft and hard alternation modulation index resistivity residual stress corrosion resistance |
