| 引用本文: | 黄杰,史学伟,廖斌,吴先映.新型多弧磁过滤系统对TiAlN薄膜的组分调控[J].中国表面工程,2019,32(2):27~33 |
| HUANG Jie,SHI Xuewei,LIAO Bin,WU Xianying.Composition Control of TiAlN Thin Film by A Novel Multi-arc Magnetic Filter System[J].China Surface Engineering,2019,32(2):27~33 |
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| 新型多弧磁过滤系统对TiAlN薄膜的组分调控 |
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黄杰1,2, 史学伟1,2, 廖斌1,2, 吴先映1,2
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1.北京师范大学 核科学与技术学院, 北京 100875;2.北京市辐射中心, 北京 100875
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| 摘要: |
| 针对磁过滤阴极真空电弧沉积技术制备多元复合薄膜的不足，设计研制一种新型的多弧磁过滤系统。该多弧磁过滤系统由两个支线管和一个干线管组成“Y”型的三通管结构。通过有限元分析和试验测量确定该新型多弧磁过滤器的最佳运行参数为：支线管和干线管的长度分别为180和230 mm，内径为200 mm。支线管和干线管的磁场强度分别为40和90 mT。采用该新型多弧磁过滤系统制备TiAlN多元复合薄膜，结果表明：该新型多弧磁过滤系统可实现多元复合薄膜的组分调控，并且膜层的表面形貌光洁，膜层元素分布均匀。 |
| 关键词: 多元复合膜 磁过滤 阴极真空电弧 组分调控 |
| DOI：10.11933/j.issn.1007-9289.20181201001 |
| 分类号:TG174.444 |
| 基金项目: |
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| Composition Control of TiAlN Thin Film by A Novel Multi-arc Magnetic Filter System |
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HUANG Jie1,2, SHI Xuewei1,2, LIAO Bin1,2, WU Xianying1,2
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1.College of Nuclear Science and Technology, Beijing Normal University, Beijing 100875, China;2.Beijing Radiation Center, Beijing 100875, China
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| Abstract: |
| A novel multi-arc magnetic filter system was designed and developed, which ensured the widely application of cathode vacuum arc technology in the field of preparing multi-component composite films. The optimal parameters of the multi-arc magnetic filter were determined by finite element analysis and experimental measurement. The lengths of the branch pipe and main pipe were 180 and 230 mm, respectively, and the inner diameter was 200 mm. The magnetic field strengths of the branch pipe and the main pipe were 40 and 90 mT, respectively. The TiAlN multi-component composite films were prepared by the system. The results show that the novel multi-arc magnetic filter system can adjust the composition of the multi-component composite films, the surface of the films layer is smooth and the film elements are evenly distributed. |
| Key words: multi-component composite films magnetic filter cathode vacuum arc component regulation |
