引用本文:麻根旺,于盛旺,黑鸿君,贾志轩,吴艳霞,申艳艳.掺Ag含量对金刚石薄膜场发射性能的影响[J].中国表面工程,2019,32(2):70~78
MA Genwang,YU Shengwang,HEI Hongjun,JIA Zhixuan,WU Yanxia,SHEN Yanyan.Effects of Ag Content on Field Emission Properties of Diamond Composite Films[J].China Surface Engineering,2019,32(2):70~78
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掺Ag含量对金刚石薄膜场发射性能的影响
麻根旺, 于盛旺, 黑鸿君, 贾志轩, 吴艳霞, 申艳艳
太原理工大学 材料科学与工程学院, 太原 030024
摘要:
采用电泳沉积的方法在钛基体上沉积了不同含量Ag纳米颗粒掺杂的金刚石复合薄膜，利用扫描电子显微镜、X射线衍射光谱和拉曼光谱对样品的结构和形貌进行表征，最后进行场发射特性的测试。SEM试验结果表明，制备得到的薄膜连续、致密且纳米颗粒均匀的分布在其中。场发射测试结果显示样品的场发射性能随着复合膜中Ag含量的增加呈现先增强后降低的趋势，在Ag纳米颗粒的掺杂含量为7.5 mg （0.18 g/L）时，复合膜的场发射性能最优。此时，开启电场（E0）低至1.55 V/μm，在1.96 V/μm的电场强度下可以得到22.69 μA/cm2的场发射电流密度，这表明适量的Ag纳米颗粒掺杂可以显著提升样品场发射性能。同时，文中结合F-N理论进一步讨论了Ag纳米颗粒掺杂含量的变化对金刚石场膜发射性能影响的作用机理。
关键词:  金刚石  Ag纳米颗粒  场发射性能
DOI：10.11933/j.issn.1007-9289.20181119003
分类号:TG174.444
基金项目:国家自然科学基金（51601124）；山西省科技重大专项（20181102013）；山西省应用基础研究计划（201601D202026）
Effects of Ag Content on Field Emission Properties of Diamond Composite Films
MA Genwang, YU Shengwang, HEI Hongjun, JIA Zhixuan, WU Yanxia, SHEN Yanyan
School of Materials Science and Engineering, Taiyuan University of Technology, Taiyuan 030024, China
Abstract:
Silver-doped diamond composite films were deposited on the titanium substrate by electrophoretic deposition. The surface morphologies and structures of the films were investigated by scanning electron microscopy(SEM), X-ray diffraction and Raman spectroscopy. The field emission properties of the samples were tested by a lab-built high vacuum system. SEM results show that the prepared diamond films are compact and continuous with Ag nanoparticles uniformly distributed. The field emission performance of Ag doped-diamond films increases first and then decreases with the increase of Ag content in the composite film. When the Ag content is chosen as 7.5 mg (0.18 g/L), the Ag doped-diamond film exhibits an optimal EFE property, and its turn on field decreases to 1.55 V/μm, and a current density of 22.69 μA/cm2 can be attained at an applied field of 1.96 V/μm. The results indicate that proper doping of Ag nanoparticles can significantly enhance the field emission properties of diamond films. Finally, the effect of Ag content nanoparticles on the emission performance of diamond films was discussed based on F-N equation.
Key words:  diamond  Ag nanoparticle  field emission property
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