引用本文:杨芳儿,常新新,林玲玲,龚润泽,周小峰,郑晓华.CNx层厚度对DLC/CNx多层膜结构和力学性能的影响[J].中国表面工程,2018,31(2):66~74
YANG Fang-er,CHANG Xin-xin,LIN Ling-ling,GONG Run-ze,ZHOU Xiao-feng,ZHENG Xiao-hua.Effects of Single Layer Thickness of CNx on Microstructure and Mechanical Properties of DLC/CNx Multilayer Films[J].China Surface Engineering,2018,31(2):66~74
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CNx层厚度对DLC/CNx多层膜结构和力学性能的影响
杨芳儿1, 常新新1, 林玲玲1, 龚润泽1, 周小峰2, 郑晓华1
1.浙江工业大学 材料科学与工程学院, 杭州 310014;2.杭州绿达金属制品有限公司, 杭州 311103
摘要:
为了降低DLC膜的内应力，提高其力学性能，采用磁控溅射法在Si（100）基体上交替沉积了不同CNx层厚度的DLC/CNx纳米多层膜。利用X射线衍射仪（XRD）、扫描电镜（SEM）、X射线光电子能谱（XPS）、拉曼光谱（Raman）、纳米压痕仪、涂层附着力划痕仪和球盘式摩擦磨损试验机等分析了多层膜的微观组织、成键结构、力学和摩擦学性能。结果表明：所有DLC/CNx多层膜均为非晶结构，结构致密，内应力低（约-475~-170 MPa），强化效应显著。随着CNx层厚度的增大，CNx膜内sp3键含量降低，DLC/CNx多层膜的硬度和结合力逐渐降低，磨损率则逐渐上升。多层膜在真空和大气中的摩擦状态平稳，摩擦因数分别为0.16和0.2，CNx层厚度的影响很小。CNx层厚度为0.5 nm的多层膜的硬度可达36.9 GPa，结合力为27 N，在两种测试环境中均具有优异的摩擦学性能。
关键词:  DLC  氮化碳  多层膜  硬度  内应力  摩擦与磨损
DOI：10.11933/j.issn.1007-9289.20170823002
分类号:TG174.444
基金项目:浙江省自然科学基金（LY15E010007）
Effects of Single Layer Thickness of CNx on Microstructure and Mechanical Properties of DLC/CNx Multilayer Films
YANG Fang-er1, CHANG Xin-xin1, LIN Ling-ling1, GONG Run-ze1, ZHOU Xiao-feng2, ZHENG Xiao-hua1
1.College of Materials Science and Engineering, Zhejiang University of Technology, Hangzhou 310014;2.Hangzhou Lvda Metal Products Co., Ltd., Hangzhou 311103
Abstract:
In order to reduce the intrinsic stress and improve the mechanical properties of DLC films, the DLC/CNx nanometer-multilayered films with various single layer thickness of CNx were deposited on Si(100) substrate by magnetron sputtering method. The microstructure, bonding structure, mechanical properties and tribological properties of the films were characterized by XRD, SEM, XPS, Raman spectroscopy, nano-indentation tester, scratch tester and ball-on-disc tribometer, respectively. The results show that all the DLC/CNx multilayer films have amorphous and compact structure and show low internal stress (in the range of -475 to -170 MPa) and strong reinforcement effect. As the mole content of sp3 bonds in the CNx film and the hardness and adhesion of the multilayer films decrease with the increase the single layer thickness of CNx, while the wear rate of the multilayer films increase gradually. The friction of the multilayer films in vacuum and air is stable, and the friction coefficient are 0.16 and 0.20, respectively. The single layer thickness of CNx has no obvious influence on the friction coefficient. The hardness of the multilayer film with a single CNx layer thickness of 0.5 nm attains 36.9 GPa, and the interface adhesion is 27 N, exhibiting excellent tribologiacl properties in the two test environments.
Key words:  DLC  carbon nitride  multilayer  hardness  internal stress  friction and wear
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