引用本文:柳堤,江少群,王刚,张启智.阳极氧化制备工艺对TiO2纳米管阵列显微形貌的影响[J].中国表面工程,2017,30(6):67~74
LIU Di,JIANG Shao-qun,WANG Gang,ZHANG Qi-zhi.Effects of Anodic Oxidation Process on Morphologies of TiO2 Nanotube Arrays[J].China Surface Engineering,2017,30(6):67~74
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阳极氧化制备工艺对TiO2纳米管阵列显微形貌的影响
柳堤1, 江少群1,2, 王刚1, 张启智1
1.河海大学 力学与材料学院,南京 211100;2.南通河海大学海洋与近海工程研究院,江苏 南通 226019
摘要:
为改善TiO2纳米管阵列结构有序性和形貌完整性，以NH4F-丙三醇-水溶液为电解液，采用一次阳极氧化法和二次阳极氧化法在Ti片表面制备TiO2纳米管阵列，借助扫描电子显微镜和原子力显微镜，研究一次阳极氧化电压、二次阳极氧化法制备过程中阳极氧化电压和一次阳极氧化时间以及退火温度对TiO2纳米管阵列显微形貌的影响。结果表明，采用一次阳极氧化法在5~25 V电压下阳极氧化Ti片120 min后均可制得有序排列的TiO2纳米管阵列，纳米管外侧面具有“竹节状”结构特征，纳米管平均管径和管间距随氧化电压升高而增大；一次阳极氧化法在20 V/120 min下制得的TiO2纳米管阵列相对较优，其表面平整度高。在相同氧化电压下采用二次阳极氧化法制备TiO2纳米管阵列不能有效改善阵列的有序程度和表面平整度。600 ℃退火会促进TiO2纳米管层/钛金属界面处的热氧化物层生长。
关键词:  TiO2  纳米管阵列  阳极氧化  退火
DOI：10.11933/j.issn.1007-9289.20170617002
分类号:
基金项目:中央高校基本科研业务费专项资金（2015B18114，2017B16114），南通市市级科技计划项目（GY12015001）
Effects of Anodic Oxidation Process on Morphologies of TiO2 Nanotube Arrays
LIU Di1, JIANG Shao-qun1,2, WANG Gang1, ZHANG Qi-zhi1
1.College of Mechanics and Materials, Hohai University, Nanjing 211100;2.Nantong Hohai University Ocean and Offshore Engineering Research Institute, Nantong 226019, Jiangsu
Abstract:
To improve the order degree and morphology integrity, TiO2 nanotube arrays were prepared by one-step anodic oxidation and two-step anodic oxidation on the surface of Ti sheets in NH4F-glycerol-H2O electrolyte, respectively. The effects of voltage of the one-step anodic oxidation, the voltage of the two-step anodic oxidation and the time of the first step in two-step anodic oxidation, and annealing temperature on the morphologies of the TiO2 nanotube arrays were studied using the scanning electron microscope and atomic force microscope. The results show that the ordered TiO2 nanotube arrays can be successfully prepared after anodic oxidizing for 120 min by one-step anodic oxidation at 5-25 V. The nanotubes are bamboo-shaped. The average tube diameter and tube spacing increase with the increase of the oxidation voltage. The TiO2 nanotube array prepared by one-step anodic oxidation at 20 V/120 min is superior relatively and its smoothness degree of the array surface is higher. When using the same oxidation voltage, the order degree and surface smoothness degree of the TiO2 nanotube arrays cannot be effectively improved by the two-step anodic oxidation. Annealing at 600 ℃ can promote the growth of thermal oxide layer at the TiO2 nanotube/metal interface.
Key words:  TiO2  nanotube arrays  anodic oxidation  annealing
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