| 引用本文: | 孙书兵,何智兵,何小珊,李力,王锋,刘艳松.敲击间隔对GDP微球表面Al涂层的影响[J].中国表面工程,2017,30(6):50~58 |
| SUN Shu-bing,HE Zhi-bing,HE Xiao-shan,LI Li,WANG Feng,LIU Yan-song.Effects of Knocking Frequency for Al Coatings on GDP Microsphere[J].China Surface Engineering,2017,30(6):50~58 |
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| 敲击间隔对GDP微球表面Al涂层的影响 |
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孙书兵1,2, 何智兵2, 何小珊2, 李力1,3, 王锋1,3, 刘艳松2
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1.重庆交通大学 材料科学与工程学院,重庆 400074;2.中国工程物理研究院 激光聚变研究中心,四川 绵阳 621900;3.重庆交通大学 交通土建工程材料国家地方联合实验室,重庆 400074
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| 摘要: |
| 金属涂层作为惯性约束聚变空心微球的保护层，对提高靶丸的性能具有重要的作用。利用磁控溅射技术和旋转与敲击相结合的驱动方式，在辉光放电聚合物微球表面溅射铝涂层，探究改变敲击间隔时长对微球涂层的影响。利用X射线照相机、白光干涉仪、扫描电镜和X射线衍射仪对微球铝涂层进行表征分析。结果表明：空心微球表面的铝涂层厚度为（2±0.1）μm，表面粗糙度控制在75 nm以下，涂层表面光滑、无裂缝，呈柱状晶生长，（111）晶面为择优取向晶面，试验重复性好。同时发现：敲击能有效改善微球涂层生长过程中的阴影效应，增加涂层的壁厚均匀性并影响微球涂层的表面粗糙度。当敲击间隔为15 s时，微球铝涂层的综合质量最佳，壁厚均匀性达93.5%，表面粗糙度为30.43 nm，优晶面的晶粒尺寸为13.66 nm。 |
| 关键词: 敲击间隔 微球 铝涂层 驱动方式 表面粗糙度 |
| DOI：10.11933/j.issn.1007-9289.20170523002 |
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| 基金项目:国家自然科学基金（51401194） |
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| Effects of Knocking Frequency for Al Coatings on GDP Microsphere |
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SUN Shu-bing1,2, HE Zhi-bing2, HE Xiao-shan2, LI Li1,3, WANG Feng1,3, LIU Yan-song2
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1.College of Materials Science and Engineering, Chongqing Jiaotong University, Chongqing 400074;2.Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900, Sichuan;3.National and Local Joint Engineering Laboratory of Traffic Civil Engineering Materials, Chongqing Jiaotong University, Chongqing 400074
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| Abstract: |
| In inertial confinement fusion, metal coating can be used as a protective layer on hollow microspheres, which plays an important role in improving the performance of the target. The aluminum coating was deposited on the glow discharge polymer microsphere by magnetron sputtering technique. Rotation and knocking were utilized to make microspheres bounce randomly. The effects of changing the length of striking interval on the quality of the aluminum coating was investigated. X-ray camera, white light interferometer, SEM and XRD were utilized to characterize the coating. The results show that the thickness of the aluminum coatings on the hollow microsphere surface is about (2±0.1) μm. The coatings' surface is smooth and free of cracks, with a roughness below 75 nm. The coatings are found with a columnar crystal structure and preferentially orienting at the (111)crystal face. The repeatability of the experiments is demonstrated to be good. It is found that knocking can effectively improve the shadowing effect in the process of coating growth. The wall thickness uniformity increases and the surface roughness is affected. When the striking interval is 15 s, the comprehensive quality of the microsphere aluminum coating is the best with the wall thickness uniformity up to 93.5%, the surface roughness of 30.43 nm, and the grain size of the preferred crystal face of 13.66 nm, respectively. |
| Key words: length of knocking interval microsphere aluminum coatings driving modes surface roughness |
