引用本文:张正权,金永中,陈昌浩,常鸿,林修州,崔学军.真空热处理对多弧离子镀TiAlSiN涂层性能的影响[J].中国表面工程,2017,30(1):70~76
ZHANG Zheng-quan,JIN Yong-zhong,CHEN Chang-hao,CHANG Hong,LIN Xiu-zhou,CUI Xue-jun.Effects of Vacuum Heat Treatment on Properties of TiAlSiN Coatings Prepared by Arc Ion Plating[J].China Surface Engineering,2017,30(1):70~76
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真空热处理对多弧离子镀TiAlSiN涂层性能的影响
张正权1, 金永中1, 陈昌浩1, 常鸿2, 林修州1, 崔学军1
1.四川理工学院 材料科学与工程学院, 四川 自贡 643000;2.成都齐兴真空镀膜技术有限公司, 成都 610064
摘要:
为提高TiAlSiN涂层的力学性能，研究了真空热处理对多弧离子镀TiAlSiN涂层微观组织和力学性能的影响。利用扫描电子显微镜（SEM）、X射线衍射仪（XRD）、自动划痕仪、纳米压痕仪、摩擦磨损测试仪等表征其表面形貌、物相组成和力学性能。结果表明：热处理引起了涂层的晶格畸变，降低了TiN固溶体相的平均晶格常数，导致其衍射峰向高角度偏移；热处理会粗化涂层表面，并导致TiAlSi中间过渡层界面消失。经过800℃热处理后，涂层的纳米硬度和结合力达到最大值，分别为35.01 GPa和54.45 N；涂层的平均摩擦因数最小，由热处理前的0.679降低至0.372，比热处理前下降了约45.2%。
关键词:  TiAlSiN涂层  真空热处理  显微结构  力学性能
DOI：10.11933/j.issn.1007-9289.20160726002
分类号:
基金项目:四川省教育厅重点项目（15ZA0232）；自贡市科技局重点项目（2015HX19，2015CZ15）；四川理工学院科研培育项目（2014PY10）
Effects of Vacuum Heat Treatment on Properties of TiAlSiN Coatings Prepared by Arc Ion Plating
ZHANG Zheng-quan1, JIN Yong-zhong1, CHEN Chang-hao1, CHANG Hong2, LIN Xiu-zhou1, CUI Xue-jun1
1.Department of Materials Science and Engineering, Sichuan University of Science and Engineering, Zigong 643000, Sichuan;2.Chengdu Qixing Vaccum Coating Technology Co. Ltd., Chengdu 610064
Abstract:
In order to improve the mechanical properties of TiAlSiN coatings, the effects of vacuum heat treatment on the microstructure and mechanical properties of TiAlSiN coatings prepared by arc ion plating was studied. The surface morphologies, phase composition and mechanical properties of the TiAlSiN coatings were characterized by scanning electron microscopy (SEM), X-ray diffraction (XRD), scratch tester, nanoindentor, and so on. The results show that heat treatment leads to the lattice distortion of the TiAlSiN coatings, which reduces the average lattice constant of TiN solid-solution phase and then causes the shift of diffraction peaks towards high angle. Heat treatment can cause a coarsening tendency on the coating surface and contribute to the disappearance of TiAlSi interlayer. After heated at 800°C, the nano hardness and adhesive force of the TiAlSiN coatings reach the maximum values, 35.01 GPa and 54.45 N, respectively. In the meantime, the average friction coefficient has the minimum value and reduces about 45.2% from 0.679 to 0.372 before and after heat treatment.
Key words:  TiAlSiN coatings  vacuum heat treatment  microstructure  mechanical properties
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