引用本文:史鑫,戴剑锋,吴贵智,张广安,陈建敏.多弧离子镀沉积Ti/TiN多层薄膜的摩擦磨损及电化学性能[J].中国表面工程,2016,29(3):20~25
SHI Xin,DAI Jian-feng,WU Gui-zhi,ZHANG Guang-an,CHEN Jian-min.Tribological and Electrochemical Properties of Ti/TiN Multilayer Film Prepared by Multi-arc Ion Plating[J].China Surface Engineering,2016,29(3):20~25
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多弧离子镀沉积Ti/TiN多层薄膜的摩擦磨损及电化学性能
史鑫1,2, 戴剑锋1, 吴贵智2, 张广安2, 陈建敏2
1.兰州理工大学 理学院, 兰州 730050;2.中国科学院兰州化学物理研究所 固体润滑国家重点实验室, 兰州 730000
摘要:
软硬交替多层结构的薄膜因其优异的抗摩擦磨损性能和耐腐蚀特性使其在工程领域具有重要的应用价值。利用多弧离子镀在不锈钢和Si(100)表面沉积了TiN单层薄膜和3种不同Ti/TiN调制比的多层膜,利用X射线衍射仪(XRD)、扫描电子显微镜(SEM)、CSM摩擦磨损试验机和电化学工作站分别分析了薄膜的结构特征、耐磨损性能和电化学性能。结果表明:多层膜层状结构明显,TiN相出现(111)面择优取向;Ti与TiN沉积时间比为1:5的样品具有较低的摩擦因数(0.26)和磨损率(6.6×10-7 mm3·N-1·m-1);在3.5%NaCl溶液中,多层膜样品的腐蚀电流密度较不锈钢基体降低了两个数量级,腐蚀电位较不锈钢基体明显提高,表明多层膜可以提高不锈钢基体的耐腐蚀性。
关键词:  Ti/TiN多层薄膜  多弧离子镀  磨损率  耐腐蚀性
DOI：10.11933/j.issn.1007-9289.2016.03.003
分类号:
基金项目:国家自然科学基金(51405476,51305433)
Tribological and Electrochemical Properties of Ti/TiN Multilayer Film Prepared by Multi-arc Ion Plating
SHI Xin1,2, DAI Jian-feng1, WU Gui-zhi2, ZHANG Guang-an2, CHEN Jian-min2
1.School of Science, Lanzhou University of Technology, Lanzhou 730050;2.State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000
Abstract:
Multilayer films are of great significance to engineering field due to their excellent anti-wear properties and corrosion resistance. The TiN single film and three types of Ti/TiN multilayer films with different modulation ratio were deposited on 304 stainless steels and Si(100) wafers by multi-arc ion plating, respectively. The microstructure, wear-resistant and electrochemistry performances of the films were analyzed by XRD, SEM, CSM tribometer and electrochemical workstation. The results indicate that the multilayer films have obvious layered structure, and TiN phase exhibits a preferred orientation at (111) lattice plane. The sample of Ti and TiN deposition time ratio of 1:5 has the lowest coefficient of friction (0.25) and wear rate (6.6×10-7 mm3·N-1·m-1). In 3.5% NaCl solution, the corrosion current densities of the multilayer films are two orders of magnitude lower than that of the substrate. Moreover, the corrosion potentials of the films positively shift than that of the substrate obviously. Therefore, the corrosion resistance of stainless steel can be improved by multilayer films.
Key words:  Ti/TiN multilayer films  multi-arc ion plating  wear rate  corrosion resistance
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