沉积温度对CrB<sub>2</sub>涂层结构与性能的影响

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引用本文:	张树参，李晓伟，王丽，张栋，柯培玲，李志勇，汪爱英.沉积温度对CrB₂涂层结构与性能的影响[J].中国表面工程,2016,29(2):69~76
	ZHANG Shucan, LI Xiaowei, WANG Li, ZHANG Dong, KE Peiling, LI Zhiyong, WANG Aiying.Influences of Deposition Temperature on Microstructure and Properties of CrB₂ Coatings[J].China Surface Engineering,2016,29(2):69~76

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沉积温度对CrB₂涂层结构与性能的影响
张树参，李晓伟，王丽，张栋，柯培玲，李志勇，汪爱英^1,2
1. 中国科学院宁波材料技术与工程研究所 a. 中国科学院海洋新材料与应用技术重点实验室， b. 浙江省海洋材料与防护技术重点实验室;2. 中北大学材料科学与工程学院

摘要:

为了研究沉积温度对涂层微结构与力学性能的影响，采用直流磁控溅射技术制备了CrB2涂层。通过XPS、XRD、SPM、SEM、HRTEM、纳米压痕仪和维氏压痕仪分别分析了涂层的成分、结构、微观形貌和力学性能。结果表明：在不同沉积温度下，CrB2涂层均由CrB2和少量Cr相组成。涂层具有致密的纳米柱状结构，其直径大约为7 nm，且沿着生长方向贯穿整个涂层截面。随沉积温度升高，涂层晶体取向由（101）和（001）的混合取向逐渐转变为（001）择优取向，涂层由纤维状结构转变为柱状晶结构，且柱状晶尺寸随沉积温度的增加逐渐细化，致密化程度增加。涂层的力学性能随沉积温度的升高而显著增加；当沉积温度达到400 ℃时，涂层具有最高硬度(50.7 ± 2) GPa和最高弹性模量(513.6 ± 10) GPa。微观结构和力学性能随沉积温度的演变归因于沉积原子运动的逐渐增强和结构的致密化。

关键词: 沉积温度 CrB2涂层微结构硬度韧性

DOI：10.11933/j.issn.1007-9289.2016.02.010

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Influences of Deposition Temperature on Microstructure and Properties of CrB₂ Coatings

ZHANG Shucan, LI Xiaowei, WANG Li, ZHANG Dong, KE Peiling, LI Zhiyong, WANG Aiying^1,2

1a. Key Laboratory of Marine Materials and Related Technologies, 1b. Zhejiang Key Laboratory of Marine Materials and Protective Technologies, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, Zhejiang;2. College of Materials Science and Engineering, North University of China

Abstract:

In order to investigate the influence of deposition temperature on microstructure and properties of CrB2 coatings. The CrB2 coatings were deposited by DC magnetron sputtering technique. The microstructure and properties were mainly analyzed by XPS, XRD, SPM, SEM, HRTEM, nanoindentation and Vickers indentation tester. The results show that all the deposited CrB2 coatings consist of CrB2 and a small amount of free Cr. The coating has a dense columnar structure with an average column diameter of 7 nm extending along the film growth direction throughout the thickness of the coating. With increasing deposition temperature, the degree of crystallization of the coating is improved and the texture changes from random orientation mixed with (101) and (001) plane to (001) preferred orientation. The microstructure evolves from the fibrous structure to the columnar structure and becomes denser and finer. Meanwhile, the mechanical properties of the coating are improved high. When the deposition temperature is 400 ℃, the coating acquires the highest hardness of (50.7 ± 2) GPa and the elasticity modulus of (513.6 ± 10) GPa, respectively. The evolution of the orientation, microstructure and mechanical properties are attributed to the enhanced surface adatom mobility with increasing as the deposition temperature.

Key words: deposition temperature CrB2 coating microstructure hardness toughness